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Study of the mechanism of multi-channel discharge in semiconductor processing by WEDM.

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Title: Study of the mechanism of multi-channel discharge in semiconductor processing by WEDM.
Authors: Chen, Hao-ran1, Liu, Zhi-dong1 liutim@nuaa.edu.cn, Huang, Sai-juan1, Pan, Hui-jun1, Qiu, Ming-bo1
Source: Materials Science in Semiconductor Processing. Apr2015, Vol. 32, p125-130. 6p.
Subjects: Semiconductors, Electrochemical electrodes, Electric wire, Power resources, Electric resistors
Abstract: This paper studies the discharge characteristics of metal and semiconductor processing by WEDM, proves single-channel discharge in metal EDM and finds multi-channel discharge phenomenon in semiconductor EDM. The mechanism has been analyzed in this paper. The main reason for multi-channel discharge is the existence of body resistor and contact barrier; thus, there still exists a high potential difference between the electrode wire and the surrounding area of discharge points after the dielectric breakdown, and this potential difference can form a second discharge. The effects of multi-channel discharge on the processing efficiency of semiconductor EDM are also studied. The energy of each discharge channel is roughly equal, and thus the multi-channel discharge at the same time can increase the energy utilization ratio of the pulsed power supply and improve the processing efficiency. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:This paper studies the discharge characteristics of metal and semiconductor processing by WEDM, proves single-channel discharge in metal EDM and finds multi-channel discharge phenomenon in semiconductor EDM. The mechanism has been analyzed in this paper. The main reason for multi-channel discharge is the existence of body resistor and contact barrier; thus, there still exists a high potential difference between the electrode wire and the surrounding area of discharge points after the dielectric breakdown, and this potential difference can form a second discharge. The effects of multi-channel discharge on the processing efficiency of semiconductor EDM are also studied. The energy of each discharge channel is roughly equal, and thus the multi-channel discharge at the same time can increase the energy utilization ratio of the pulsed power supply and improve the processing efficiency. [ABSTRACT FROM AUTHOR]
ISSN:13698001
DOI:10.1016/j.mssp.2014.12.061