Bibliographic Details
| Title: |
IC-Integrated Flexible Shear-Stress Sensor Skin. |
| Authors: |
Yong Xu1 yxu@ece.eng.wayne.edu, Yu-Chong Tai2, Huang, Adam3, Chih-Ming Ho3 |
| Source: |
Journal of Microelectromechanical Systems. Oct2003, Vol. 12 Issue 5, p740-747. 8p. 8 Black and White Photographs, 6 Diagrams, 3 Graphs. |
| Subjects: |
Detectors, Microelectromechanical systems, Integrated circuits |
| Abstract: |
This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 µm thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with on-skin sensor bias, signal-conditioning, and multiplexing circuitry. We further demonstrated the application of the sensor skin by packaging it on a semicylindrical aluminum block and testing it in a subsonic wind tunnel. In our experiment, the sensor skin has successfully identified both the leading-edge flow separation and stagnation points with the on-skin circuitry. The integration of lC with MEMS sensor skin has significantly simplified implementation procedures and improved system reliability. [ABSTRACT FROM AUTHOR] |
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| Database: |
Engineering Source |
