IC-Integrated Flexible Shear-Stress Sensor Skin.
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| Title: | IC-Integrated Flexible Shear-Stress Sensor Skin. |
|---|---|
| Authors: | Yong Xu1 yxu@ece.eng.wayne.edu, Yu-Chong Tai2, Huang, Adam3, Chih-Ming Ho3 |
| Source: | Journal of Microelectromechanical Systems. Oct2003, Vol. 12 Issue 5, p740-747. 8p. 8 Black and White Photographs, 6 Diagrams, 3 Graphs. |
| Subjects: | Detectors, Microelectromechanical systems, Integrated circuits |
| Abstract: | This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 µm thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with on-skin sensor bias, signal-conditioning, and multiplexing circuitry. We further demonstrated the application of the sensor skin by packaging it on a semicylindrical aluminum block and testing it in a subsonic wind tunnel. In our experiment, the sensor skin has successfully identified both the leading-edge flow separation and stagnation points with the on-skin circuitry. The integration of lC with MEMS sensor skin has significantly simplified implementation procedures and improved system reliability. [ABSTRACT FROM AUTHOR] |
| Copyright of Journal of Microelectromechanical Systems is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 11511368 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: IC-Integrated Flexible Shear-Stress Sensor Skin. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Yong+Xu%22">Yong Xu</searchLink><relatesTo>1</relatesTo><i> yxu@ece.eng.wayne.edu</i><br /><searchLink fieldCode="AR" term="%22Yu-Chong+Tai%22">Yu-Chong Tai</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Huang%2C+Adam%22">Huang, Adam</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Chih-Ming+Ho%22">Chih-Ming Ho</searchLink><relatesTo>3</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Microelectromechanical+Systems%22">Journal of Microelectromechanical Systems</searchLink>. Oct2003, Vol. 12 Issue 5, p740-747. 8p. 8 Black and White Photographs, 6 Diagrams, 3 Graphs. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Detectors%22">Detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Microelectromechanical+systems%22">Microelectromechanical systems</searchLink><br /><searchLink fieldCode="DE" term="%22Integrated+circuits%22">Integrated circuits</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 µm thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with on-skin sensor bias, signal-conditioning, and multiplexing circuitry. We further demonstrated the application of the sensor skin by packaging it on a semicylindrical aluminum block and testing it in a subsonic wind tunnel. In our experiment, the sensor skin has successfully identified both the leading-edge flow separation and stagnation points with the on-skin circuitry. The integration of lC with MEMS sensor skin has significantly simplified implementation procedures and improved system reliability. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Journal of Microelectromechanical Systems is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1109/JMEMS.2003.815831 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 8 StartPage: 740 Subjects: – SubjectFull: Detectors Type: general – SubjectFull: Microelectromechanical systems Type: general – SubjectFull: Integrated circuits Type: general Titles: – TitleFull: IC-Integrated Flexible Shear-Stress Sensor Skin. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Yong Xu – PersonEntity: Name: NameFull: Yu-Chong Tai – PersonEntity: Name: NameFull: Huang, Adam – PersonEntity: Name: NameFull: Chih-Ming Ho IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 10 Text: Oct2003 Type: published Y: 2003 Identifiers: – Type: issn-print Value: 10577157 Numbering: – Type: volume Value: 12 – Type: issue Value: 5 Titles: – TitleFull: Journal of Microelectromechanical Systems Type: main |
| ResultId | 1 |
