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A novel capacitive pressure sensor based on non-coplanar comb electrodes.

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Title: A novel capacitive pressure sensor based on non-coplanar comb electrodes.
Authors: Liu, Zhenyu1,2 (AUTHOR), Pan, Yichen1,2 (AUTHOR), Wu, Pang1,2 (AUTHOR), Du, Lidong1 (AUTHOR) lddu@mail.ie.ac.cn, Zhao, Zhan1,2 (AUTHOR) zhaozhan@mail.ie.ac.cn, Fang, Zhen1,2 (AUTHOR)
Source: Sensors & Actuators A: Physical. Oct2019, Vol. 297, pN.PAG-N.PAG. 1p.
Subjects: Pressure sensors, Capacitive sensors, Electrodes, Finite element method, Ultrasonic transducers
Abstract: • A novel capacitive pressure sensor was developed. • Non-coplanar comb finger electrodes avoided the problem of the electrode leads. • A prototype sensor chip was fabricated using only three masks based on a SOI wafer. • Sensor chip exhibited high linearity over an improved linear range. Aiming at the problem of the nonlinearity and cavity leads of traditional capacitive pressure sensors, a non-coplanar comb electrode structure is proposed. The variation of the overlap areas of comb electrodes reflects the change in capacitance, thereby improving the linearity of the sensor. At the same time, the non-coplanar comb electrodes are designed outside the cavity, avoiding the extra fabrication process caused by the electrode leads. Theoretical analysis and finite element simulation analysis based on COMSOL software verified the feasibility of the proposed structure. The prototype sensor chip is successfully fabricated using only three masks based on a SOI wafer and hermetically sealed at 100 kPa. The fabricated sensor chip is tested to a sensitivity of 17aF/Pa and non-linearity error of 1.37% with the pressure ranged from 0 to 30 kPa. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:• A novel capacitive pressure sensor was developed. • Non-coplanar comb finger electrodes avoided the problem of the electrode leads. • A prototype sensor chip was fabricated using only three masks based on a SOI wafer. • Sensor chip exhibited high linearity over an improved linear range. Aiming at the problem of the nonlinearity and cavity leads of traditional capacitive pressure sensors, a non-coplanar comb electrode structure is proposed. The variation of the overlap areas of comb electrodes reflects the change in capacitance, thereby improving the linearity of the sensor. At the same time, the non-coplanar comb electrodes are designed outside the cavity, avoiding the extra fabrication process caused by the electrode leads. Theoretical analysis and finite element simulation analysis based on COMSOL software verified the feasibility of the proposed structure. The prototype sensor chip is successfully fabricated using only three masks based on a SOI wafer and hermetically sealed at 100 kPa. The fabricated sensor chip is tested to a sensitivity of 17aF/Pa and non-linearity error of 1.37% with the pressure ranged from 0 to 30 kPa. [ABSTRACT FROM AUTHOR]
ISSN:09244247
DOI:10.1016/j.sna.2019.07.049