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A novel capacitive pressure sensor based on non-coplanar comb electrodes.

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Title: A novel capacitive pressure sensor based on non-coplanar comb electrodes.
Authors: Liu, Zhenyu1,2 (AUTHOR), Pan, Yichen1,2 (AUTHOR), Wu, Pang1,2 (AUTHOR), Du, Lidong1 (AUTHOR) lddu@mail.ie.ac.cn, Zhao, Zhan1,2 (AUTHOR) zhaozhan@mail.ie.ac.cn, Fang, Zhen1,2 (AUTHOR)
Source: Sensors & Actuators A: Physical. Oct2019, Vol. 297, pN.PAG-N.PAG. 1p.
Subjects: Pressure sensors, Capacitive sensors, Electrodes, Finite element method, Ultrasonic transducers
Abstract: • A novel capacitive pressure sensor was developed. • Non-coplanar comb finger electrodes avoided the problem of the electrode leads. • A prototype sensor chip was fabricated using only three masks based on a SOI wafer. • Sensor chip exhibited high linearity over an improved linear range. Aiming at the problem of the nonlinearity and cavity leads of traditional capacitive pressure sensors, a non-coplanar comb electrode structure is proposed. The variation of the overlap areas of comb electrodes reflects the change in capacitance, thereby improving the linearity of the sensor. At the same time, the non-coplanar comb electrodes are designed outside the cavity, avoiding the extra fabrication process caused by the electrode leads. Theoretical analysis and finite element simulation analysis based on COMSOL software verified the feasibility of the proposed structure. The prototype sensor chip is successfully fabricated using only three masks based on a SOI wafer and hermetically sealed at 100 kPa. The fabricated sensor chip is tested to a sensitivity of 17aF/Pa and non-linearity error of 1.37% with the pressure ranged from 0 to 30 kPa. [ABSTRACT FROM AUTHOR]
Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 138651426
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: A novel capacitive pressure sensor based on non-coplanar comb electrodes.
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  Data: <searchLink fieldCode="AR" term="%22Liu%2C+Zhenyu%22">Liu, Zhenyu</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Pan%2C+Yichen%22">Pan, Yichen</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wu%2C+Pang%22">Wu, Pang</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Du%2C+Lidong%22">Du, Lidong</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> lddu@mail.ie.ac.cn</i><br /><searchLink fieldCode="AR" term="%22Zhao%2C+Zhan%22">Zhao, Zhan</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> zhaozhan@mail.ie.ac.cn</i><br /><searchLink fieldCode="AR" term="%22Fang%2C+Zhen%22">Fang, Zhen</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%26+Actuators+A%3A+Physical%22">Sensors & Actuators A: Physical</searchLink>. Oct2019, Vol. 297, pN.PAG-N.PAG. 1p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Pressure+sensors%22">Pressure sensors</searchLink><br /><searchLink fieldCode="DE" term="%22Capacitive+sensors%22">Capacitive sensors</searchLink><br /><searchLink fieldCode="DE" term="%22Electrodes%22">Electrodes</searchLink><br /><searchLink fieldCode="DE" term="%22Finite+element+method%22">Finite element method</searchLink><br /><searchLink fieldCode="DE" term="%22Ultrasonic+transducers%22">Ultrasonic transducers</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: • A novel capacitive pressure sensor was developed. • Non-coplanar comb finger electrodes avoided the problem of the electrode leads. • A prototype sensor chip was fabricated using only three masks based on a SOI wafer. • Sensor chip exhibited high linearity over an improved linear range. Aiming at the problem of the nonlinearity and cavity leads of traditional capacitive pressure sensors, a non-coplanar comb electrode structure is proposed. The variation of the overlap areas of comb electrodes reflects the change in capacitance, thereby improving the linearity of the sensor. At the same time, the non-coplanar comb electrodes are designed outside the cavity, avoiding the extra fabrication process caused by the electrode leads. Theoretical analysis and finite element simulation analysis based on COMSOL software verified the feasibility of the proposed structure. The prototype sensor chip is successfully fabricated using only three masks based on a SOI wafer and hermetically sealed at 100 kPa. The fabricated sensor chip is tested to a sensitivity of 17aF/Pa and non-linearity error of 1.37% with the pressure ranged from 0 to 30 kPa. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Sensors & Actuators A: Physical is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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        Value: 10.1016/j.sna.2019.07.049
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      – Code: eng
        Text: English
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        PageCount: 1
        StartPage: N.PAG
    Subjects:
      – SubjectFull: Pressure sensors
        Type: general
      – SubjectFull: Capacitive sensors
        Type: general
      – SubjectFull: Electrodes
        Type: general
      – SubjectFull: Finite element method
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      – SubjectFull: Ultrasonic transducers
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      – TitleFull: A novel capacitive pressure sensor based on non-coplanar comb electrodes.
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            NameFull: Liu, Zhenyu
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            NameFull: Pan, Yichen
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            NameFull: Wu, Pang
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            NameFull: Du, Lidong
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            NameFull: Zhao, Zhan
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            NameFull: Fang, Zhen
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            – D: 01
              M: 10
              Text: Oct2019
              Type: published
              Y: 2019
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              Value: 297
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