Bibliographic Details
| Title: |
Design and Evaluation of Wafer Transfer System for LSI Production. |
| Authors: |
Sakano, Susumu1, Kuroda, Hisao1, Asakawa, Makoto1 |
| Source: |
Electronics & Communications in Japan, Part 2: Electronics. Aug87, Vol. 70 Issue 8, p30-42. 13p. |
| Subjects: |
Wafer-scale integration of circuits, Systolic array circuits, Very large scale circuit integration, Integrated circuits, Electronic circuits, Electronic systems |
| Abstract: |
An automatic wafer transportation system has been developed that is suitable for the LSI fabrication line. Design objectives have been to achieve a flexible wafer routing and flexible line construction ensuring a high degree of cleanliness. The system consists of a computer-controlled carriage system carrying wafer cassettes on a ceiling track, and standardized interface mechanisms installed on each equipment. This paper describes technical factors involved in the realization of flexible lines, and considers also fundamental track arrangement, carriage characteristics, a wafer-routing control method, and low dust mechanisms. [ABSTRACT FROM AUTHOR] |
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| Database: |
Engineering Source |
