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Characteristics of GZO-based multilayer transparent conducting films.

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Title: Characteristics of GZO-based multilayer transparent conducting films.
Authors: Liu, Chih-Yi1 (AUTHOR) cyliu@nkust.edu.tw, Lin, Chao-Cheng2 (AUTHOR), Lai, Chun-Hung3 (AUTHOR), Liu, Shih-Kun4 (AUTHOR) cyliu@nkust.edu.tw, Ye, Chang-Sin5 (AUTHOR), Tien, Wei-Chen5 (AUTHOR), Hsu, Meng-Ren1 (AUTHOR)
Source: International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics. 5/30/2021, Vol. 35 Issue 14-16, p1-5. 5p.
Subjects: Optical properties, Multilayered thin films, Thermal stability, Zinc oxide, Evaporators
Abstract: Ga-doped ZnO (GZO)/metal/GZO structures were fabricated on glass substrates to be the transparent conducting layers in this study. GZO films and metal films were deposited at room-temperature by a radio-frequency sputter and a thermal evaporator, respectively. The GZO/Ag/GZO (GAG) structures had poor electrical and optical properties due to the formation of Ag islands on the GZO layer. A 1-nm Cu seed layer was deposited on the GZO layer to fabricate the GZO/Ag/Cu/GZO (GACG) structure to improve its electrical and optical properties. The GACG structure had sheet resistance of 9 Ω , average visible transmittance of 86% and figure of merit of 2. 5 × 1 0 − 2 Ω − 1 . In addition, the sheet resistance of the GACG structure kept almost the same after annealing at 3 0 0 ∘ C in atmosphere for more than 5 h, which showed good thermal stability. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:Ga-doped ZnO (GZO)/metal/GZO structures were fabricated on glass substrates to be the transparent conducting layers in this study. GZO films and metal films were deposited at room-temperature by a radio-frequency sputter and a thermal evaporator, respectively. The GZO/Ag/GZO (GAG) structures had poor electrical and optical properties due to the formation of Ag islands on the GZO layer. A 1-nm Cu seed layer was deposited on the GZO layer to fabricate the GZO/Ag/Cu/GZO (GACG) structure to improve its electrical and optical properties. The GACG structure had sheet resistance of 9 Ω , average visible transmittance of 86% and figure of merit of 2. 5 × 1 0 − 2 Ω − 1 . In addition, the sheet resistance of the GACG structure kept almost the same after annealing at 3 0 0 ∘ C in atmosphere for more than 5 h, which showed good thermal stability. [ABSTRACT FROM AUTHOR]
ISSN:02179792
DOI:10.1142/S021797922140004X