Effect of Periodic Modulation of Tungsten Oxide Magnetron Deposition Angle upon the Obtained Layer Structure according to X-Ray Reflectometry Measurements.
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| Title: | Effect of Periodic Modulation of Tungsten Oxide Magnetron Deposition Angle upon the Obtained Layer Structure according to X-Ray Reflectometry Measurements. |
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| Authors: | Matveev, V. A.1 (AUTHOR), Eruzin, A. A.2 (AUTHOR), Semenova, A. A.3 (AUTHOR), Mjakin, S. V.3,4 (AUTHOR) svmjakin@technolog.edu.ru, Katashev, P. A.3 (AUTHOR) |
| Source: | Glass Physics & Chemistry. Dec2021 Supplement, Vol. 47 Issue 1, pS63-S66. 4p. |
| Subjects: | X-ray reflectometry, Tungsten oxides, Magnetron sputtering, Electrochromic effect, Electrochromic devices, Magnetrons, Electron density |
| Abstract: | X-ray reflectometry characterization of tungsten oxide nanolayers deposited onto glass supports via magnetron sputtering in a stationary mode and using the rotating support revealed that non-stationary deposition mode involving the support rotation provides coatings with a complex structure featuring with a periodic electron density modulation in depth that is promising for the adjustment of the target performances. Particularly, the application of this approach provided a significant increase of the electrochromic efficiency and coloration/bleaching rate for electrochromic devices in comparison with counterparts obtained by tungsten oxide layer deposition onto a stationary support. [ABSTRACT FROM AUTHOR] |
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| Database: | Engineering Source |
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| Abstract: | X-ray reflectometry characterization of tungsten oxide nanolayers deposited onto glass supports via magnetron sputtering in a stationary mode and using the rotating support revealed that non-stationary deposition mode involving the support rotation provides coatings with a complex structure featuring with a periodic electron density modulation in depth that is promising for the adjustment of the target performances. Particularly, the application of this approach provided a significant increase of the electrochromic efficiency and coloration/bleaching rate for electrochromic devices in comparison with counterparts obtained by tungsten oxide layer deposition onto a stationary support. [ABSTRACT FROM AUTHOR] |
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| ISSN: | 10876596 |
| DOI: | 10.1134/S1087659621070075 |
