Matveev, V. A., Eruzin, A. A., Semenova, A. A., Mjakin, S. V., & Katashev, P. A. (2021). Effect of Periodic Modulation of Tungsten Oxide Magnetron Deposition Angle upon the Obtained Layer Structure according to X-Ray Reflectometry Measurements. Glass Physics & Chemistry, 47(1), S63. https://doi.org/10.1134/S1087659621070075
Chicago Style (17th ed.) CitationMatveev, V. A., A. A. Eruzin, A. A. Semenova, S. V. Mjakin, and P. A. Katashev. "Effect of Periodic Modulation of Tungsten Oxide Magnetron Deposition Angle upon the Obtained Layer Structure According to X-Ray Reflectometry Measurements." Glass Physics & Chemistry 47, no. 1 (2021): S63. https://doi.org/10.1134/S1087659621070075.
MLA (9th ed.) CitationMatveev, V. A., et al. "Effect of Periodic Modulation of Tungsten Oxide Magnetron Deposition Angle upon the Obtained Layer Structure According to X-Ray Reflectometry Measurements." Glass Physics & Chemistry, vol. 47, no. 1, 2021, p. S63, https://doi.org/10.1134/S1087659621070075.