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Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy.

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Title: Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy.
Authors: Vesel, Alenka1 (AUTHOR), Zaplotnik, Rok1 (AUTHOR), Primc, Gregor1 (AUTHOR), Mozetic, Miran1 (AUTHOR) miran.mozetic@guest.arnes.si
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films. Jul2023, Vol. 41 Issue 4, p1-12. 12p.
Subjects: Glow discharges, Emission spectroscopy, Optical spectroscopy, Depth profiling, Thin films, Plasma gases
Abstract: Glow discharge optical emission spectroscopy (GDOES) is a useful technique for qualitative plasma characterization. It also enables depth profiling of solid materials upon exposure of samples to energetic positively charged ions from gaseous plasma, providing specifics of both surface- and gas-phase collision phenomena that are considered. The early stages of developing GDOES useful for the determination of surface composition and depth profiling of solid materials are reviewed and analyzed, stressing the contribution of early authors. The advantages as well as drawbacks of the GDOES technique are presented and discussed. The recent applications of this technique for depth profiling of various materials are presented, and the directions for constructing a laboratory-scale device are provided. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 164785010
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy.
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  Data: <searchLink fieldCode="AR" term="%22Vesel%2C+Alenka%22">Vesel, Alenka</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zaplotnik%2C+Rok%22">Zaplotnik, Rok</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Primc%2C+Gregor%22">Primc, Gregor</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Mozetic%2C+Miran%22">Mozetic, Miran</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> miran.mozetic@guest.arnes.si</i>
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  Data: <searchLink fieldCode="DE" term="%22Glow+discharges%22">Glow discharges</searchLink><br /><searchLink fieldCode="DE" term="%22Emission+spectroscopy%22">Emission spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+spectroscopy%22">Optical spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Depth+profiling%22">Depth profiling</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Plasma+gases%22">Plasma gases</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Glow discharge optical emission spectroscopy (GDOES) is a useful technique for qualitative plasma characterization. It also enables depth profiling of solid materials upon exposure of samples to energetic positively charged ions from gaseous plasma, providing specifics of both surface- and gas-phase collision phenomena that are considered. The early stages of developing GDOES useful for the determination of surface composition and depth profiling of solid materials are reviewed and analyzed, stressing the contribution of early authors. The advantages as well as drawbacks of the GDOES technique are presented and discussed. The recent applications of this technique for depth profiling of various materials are presented, and the directions for constructing a laboratory-scale device are provided. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=164785010
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1116/6.0002695
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 12
        StartPage: 1
    Subjects:
      – SubjectFull: Glow discharges
        Type: general
      – SubjectFull: Emission spectroscopy
        Type: general
      – SubjectFull: Optical spectroscopy
        Type: general
      – SubjectFull: Depth profiling
        Type: general
      – SubjectFull: Thin films
        Type: general
      – SubjectFull: Plasma gases
        Type: general
    Titles:
      – TitleFull: Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy.
        Type: main
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          Name:
            NameFull: Vesel, Alenka
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            NameFull: Zaplotnik, Rok
      – PersonEntity:
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            NameFull: Primc, Gregor
      – PersonEntity:
          Name:
            NameFull: Mozetic, Miran
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          Dates:
            – D: 01
              M: 07
              Text: Jul2023
              Type: published
              Y: 2023
          Identifiers:
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              Value: 07342101
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              Value: 41
            – Type: issue
              Value: 4
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
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