NO2 gas sensing performance of Ag−WO3−x thin films prepared by reactive magnetron sputtering process.
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| Title: | NO |
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| Authors: | Hossain, Modassar1 (AUTHOR), Sarkar, Krishnendu1 (AUTHOR), Mondal, Arnab2 (AUTHOR), Bag, Ankush3 (AUTHOR), Kuiri, Probodh Kumar4 (AUTHOR), Roopa5 (AUTHOR), Kumar, M. Senthil5 (AUTHOR), Bysakh, Sandip1 (AUTHOR), Pal, Prabir1 (AUTHOR) prabir.p@cgcri.res.in |
| Source: | Applied Physics A: Materials Science & Processing. Dec2023, Vol. 129 Issue 12, p1-13. 13p. |
| Subjects: | Magnetron sputtering, Reactive sputtering, Thin films, Magnetrons, X-ray photoelectron spectroscopy, Transmission electron microscopes, Trace gases |
| Abstract: | We have demonstrated a comparative study of NO2 gas sensing behavior of reactive sputtered growth WO3−x nanocrystalline thin films and its functionalization with Ag nanoparticles (Ag−WO3−x) on Si/SiO2 substrates. X-ray diffraction and transmission electron microscope characterizations demonstrate the formation of polycrystalline monoclinic phase of porous WO3-x thin film. X-ray photoelectron spectroscopy experiments reveal that W6+ charge state has higher concentration compared with that of W4+ and W5+. The Ag−WO3−x films exhibit a sensitivity of about 70% at 10 ppm, while WO3−x films show 12%, measured at 225 °C with same NO2 gas concentration. The response and recovery time are 2 and 3 min. for Ag−WO3−x films, while these for WO3−x films are 3 and 4 min., respectively. This work shows that nano-scale dendritic agglomeration growth of Ag nanoparticles on WO3−x surface can increase active sites for NO2 gas and play an important role in trace-level gas sensing performance. [ABSTRACT FROM AUTHOR] |
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| Database: | Engineering Source |
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| Abstract: | We have demonstrated a comparative study of NO2 gas sensing behavior of reactive sputtered growth WO3−x nanocrystalline thin films and its functionalization with Ag nanoparticles (Ag−WO3−x) on Si/SiO2 substrates. X-ray diffraction and transmission electron microscope characterizations demonstrate the formation of polycrystalline monoclinic phase of porous WO3-x thin film. X-ray photoelectron spectroscopy experiments reveal that W6+ charge state has higher concentration compared with that of W4+ and W5+. The Ag−WO3−x films exhibit a sensitivity of about 70% at 10 ppm, while WO3−x films show 12%, measured at 225 °C with same NO2 gas concentration. The response and recovery time are 2 and 3 min. for Ag−WO3−x films, while these for WO3−x films are 3 and 4 min., respectively. This work shows that nano-scale dendritic agglomeration growth of Ag nanoparticles on WO3−x surface can increase active sites for NO2 gas and play an important role in trace-level gas sensing performance. [ABSTRACT FROM AUTHOR] |
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| ISSN: | 09478396 |
| DOI: | 10.1007/s00339-023-07134-7 |
