Sub‐nanometre quality X‐ray mirrors created using ion beam figuring.
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| Title: | Sub‐nanometre quality X‐ray mirrors created using ion beam figuring. |
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| Authors: | Majhi, Arindam1 (AUTHOR), Shurvinton, Riley1 (AUTHOR), Pradhan, Paresh Chandra1 (AUTHOR), Hand, Matthew1 (AUTHOR), Gu, Weichen1,2 (AUTHOR), Da Silva, Murilo Bazan1 (AUTHOR), Moriconi, Simone1 (AUTHOR), Nistea, Ioana1 (AUTHOR), Alcock, Simon G.1 (AUTHOR), Wang, Hongchang1 (AUTHOR) hongchang.wang@diamond.ac.uk, Sawhney, Kawal1 (AUTHOR) |
| Source: | Journal of Synchrotron Radiation. Jul2024, Vol. 31 Issue 4, p706-715. 10p. |
| Subjects: | International Boxing Federation (IBF), X-rays, Light sources, Angular measurements, Ion sources, Ion beams, Speckle interference, Mirrors |
| Abstract: | Ion beam figuring (IBF) is a powerful technique for figure correction of X‐ray mirrors to a high accuracy. Here, recent technical advancements in the IBF instrument developed at Diamond Light Source are presented and experimental results for figuring of X‐ray mirrors are given. The IBF system is equipped with a stable DC gridded ion source (120 mm diameter), a four‐axis motion stage to manipulate the optic, a Faraday cup to monitor the ion‐beam current, and a camera for alignment. A novel laser speckle angular measurement instrument also provides on‐board metrology. To demonstrate the IBF system's capabilities, two silicon X‐ray mirrors were processed. For 1D correction, a height error of 0.08 nm r.m.s. and a slope error of 44 nrad r.m.s. were achieved. For 2D correction over a 67 mm × 17 mm clear aperture, a height error of 0.8 nm r.m.s. and a slope error of 230 nrad r.m.s. were obtained. For the 1D case, this optical quality is comparable with the highest‐grade, commercially available, X‐ray optics. [ABSTRACT FROM AUTHOR] |
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| Database: | Engineering Source |
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| Abstract: | Ion beam figuring (IBF) is a powerful technique for figure correction of X‐ray mirrors to a high accuracy. Here, recent technical advancements in the IBF instrument developed at Diamond Light Source are presented and experimental results for figuring of X‐ray mirrors are given. The IBF system is equipped with a stable DC gridded ion source (120 mm diameter), a four‐axis motion stage to manipulate the optic, a Faraday cup to monitor the ion‐beam current, and a camera for alignment. A novel laser speckle angular measurement instrument also provides on‐board metrology. To demonstrate the IBF system's capabilities, two silicon X‐ray mirrors were processed. For 1D correction, a height error of 0.08 nm r.m.s. and a slope error of 44 nrad r.m.s. were achieved. For 2D correction over a 67 mm × 17 mm clear aperture, a height error of 0.8 nm r.m.s. and a slope error of 230 nrad r.m.s. were obtained. For the 1D case, this optical quality is comparable with the highest‐grade, commercially available, X‐ray optics. [ABSTRACT FROM AUTHOR] |
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| ISSN: | 09090495 |
| DOI: | 10.1107/S1600577524004594 |
