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High-sensitivity silicon nitride optical temperature sensor based on cascaded Mach-Zehnder interferometers.

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Title: High-sensitivity silicon nitride optical temperature sensor based on cascaded Mach-Zehnder interferometers.
Authors: Chen, Li-Yu1 (AUTHOR), Chen, Yong-Jun1 (AUTHOR), Wu, De-Sheng1 (AUTHOR), Huang, Wen-Hsien2 (AUTHOR), Wang, Chun-Ta1 (AUTHOR) ctwang@mail.nsysu.edu.tw
Source: Optical Materials. Aug2025, Vol. 165, pN.PAG-N.PAG. 1p.
Subjects: Temperature sensors, Light filters, Optical losses, Optical sensors, Temperature measurements
Abstract: This study presents the design, fabrication, and characterization of a high-sensitivity optical temperature sensor utilizing cascaded Mach-Zehnder interferometers (MZIs) on a silicon nitride on an insulator platform. Silicon nitride is an optimal material for waveguides due to its compatibility with complementary metal-oxide semiconductor (CMOS) technology, low optical losses, and extensive operational spectral range, despite its relatively low thermal-optic coefficient (TOC). The sensor comprises two MZI structures with similar free spectral ranges (FSRs), but differing sensitivities achieved through tailored geometries. The device exhibits a markedly enhanced temperature sensitivity compared to conventional silicon nitride- and silicon-based sensors. The measurements yielded a temperature sensitivity of 710 p.m./°C, confirming the sensitivity enhancement over traditional MZI configurations. In addition to temperature sensing, the demonstrated cascaded MZI structure is also promising for thermo-optic tuning, optical filtering, and switching applications, especially in systems where silicon nitride is preferred due to its broadband transparency and low loss. The proposed sensor represents a robust solution for precise temperature measurements in industrial, medical, and environmental applications. • This study designs a high-sensitivity optical temperature sensor using cascaded Mach-Zehnder interferometers (MZIs). • The cascaded MZIs were fabricated on a silicon nitride on an insulator platform. • The silicon nitride waveguide platform enables a wide operational spectral range. • The proposed temperature sensor exhibits an enhanced temperature sensitivity of 710 pm/°C. • The fabrication process employed is fully compatible with CMOS technology. [ABSTRACT FROM AUTHOR]
Copyright of Optical Materials is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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DbLabel: Engineering Source
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  Data: High-sensitivity silicon nitride optical temperature sensor based on cascaded Mach-Zehnder interferometers.
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  Data: <searchLink fieldCode="AR" term="%22Chen%2C+Li-Yu%22">Chen, Li-Yu</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chen%2C+Yong-Jun%22">Chen, Yong-Jun</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wu%2C+De-Sheng%22">Wu, De-Sheng</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Huang%2C+Wen-Hsien%22">Huang, Wen-Hsien</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Chun-Ta%22">Wang, Chun-Ta</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> ctwang@mail.nsysu.edu.tw</i>
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  Data: <searchLink fieldCode="DE" term="%22Temperature+sensors%22">Temperature sensors</searchLink><br /><searchLink fieldCode="DE" term="%22Light+filters%22">Light filters</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+losses%22">Optical losses</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+sensors%22">Optical sensors</searchLink><br /><searchLink fieldCode="DE" term="%22Temperature+measurements%22">Temperature measurements</searchLink>
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  Data: This study presents the design, fabrication, and characterization of a high-sensitivity optical temperature sensor utilizing cascaded Mach-Zehnder interferometers (MZIs) on a silicon nitride on an insulator platform. Silicon nitride is an optimal material for waveguides due to its compatibility with complementary metal-oxide semiconductor (CMOS) technology, low optical losses, and extensive operational spectral range, despite its relatively low thermal-optic coefficient (TOC). The sensor comprises two MZI structures with similar free spectral ranges (FSRs), but differing sensitivities achieved through tailored geometries. The device exhibits a markedly enhanced temperature sensitivity compared to conventional silicon nitride- and silicon-based sensors. The measurements yielded a temperature sensitivity of 710 p.m./°C, confirming the sensitivity enhancement over traditional MZI configurations. In addition to temperature sensing, the demonstrated cascaded MZI structure is also promising for thermo-optic tuning, optical filtering, and switching applications, especially in systems where silicon nitride is preferred due to its broadband transparency and low loss. The proposed sensor represents a robust solution for precise temperature measurements in industrial, medical, and environmental applications. • This study designs a high-sensitivity optical temperature sensor using cascaded Mach-Zehnder interferometers (MZIs). • The cascaded MZIs were fabricated on a silicon nitride on an insulator platform. • The silicon nitride waveguide platform enables a wide operational spectral range. • The proposed temperature sensor exhibits an enhanced temperature sensitivity of 710 pm/°C. • The fabrication process employed is fully compatible with CMOS technology. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
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  Data: <i>Copyright of Optical Materials is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.optmat.2025.117139
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      – SubjectFull: Optical losses
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              Text: Aug2025
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