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A low-cost wire grid polarizer with an average extinction ratio of 40 dB in SWIR range realized by oblique angled deposition.

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Title: A low-cost wire grid polarizer with an average extinction ratio of 40 dB in SWIR range realized by oblique angled deposition.
Authors: Liu, Xingwei1 (AUTHOR), Lin, Zefan1 (AUTHOR), Zhang, Zhehao1 (AUTHOR), Chai, Yuwei1 (AUTHOR), Wang, Lingxue1 (AUTHOR), Kang, Guoguo1 (AUTHOR) kgg@bit.edu.cn
Source: Optics & Laser Technology. Nov2025, Vol. 189, pN.PAG-N.PAG. 1p.
Subjects: Wave analysis, Lithography, Etching, Metals, Lasers
Abstract: Classical metal wire grid polarizers are commonly employed as infrared polarizers due to their broad operating spectrum. However, their low extinction ratio limits applications in high-precision infrared polarization in short-wavelength infrared range. Analysis using the Rigorous Coupled Wave Analysis indicates that the extinction ratio of a metal wire grid polarizer is positively correlated with the depth of the metal grating layer. Traditional etching and lift-off methods are insufficient for achieving the necessary depth to realize a high extinction ratio. In this paper, we propose an approach to fabricate infrared wire grid polarizers with ultra-high extinction ratios by combining Laser Interference Lithography with Oblique Angled Deposition method. The wire grid polarizer has a periodic structure of 300 nm and a grating layer depth of 450 nm, with an aspect ratio of 3:1. Experimental results demonstrate that the average transmission for TM wave exceeds 70 %, while the average extinction ratio surpasses 40 dB (10000:1) within the 1 μm to 2.5 μm range. The wire grid polarizer fabricated using the simple and low-cost methods has the potential to become a commercially viable product. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:Classical metal wire grid polarizers are commonly employed as infrared polarizers due to their broad operating spectrum. However, their low extinction ratio limits applications in high-precision infrared polarization in short-wavelength infrared range. Analysis using the Rigorous Coupled Wave Analysis indicates that the extinction ratio of a metal wire grid polarizer is positively correlated with the depth of the metal grating layer. Traditional etching and lift-off methods are insufficient for achieving the necessary depth to realize a high extinction ratio. In this paper, we propose an approach to fabricate infrared wire grid polarizers with ultra-high extinction ratios by combining Laser Interference Lithography with Oblique Angled Deposition method. The wire grid polarizer has a periodic structure of 300 nm and a grating layer depth of 450 nm, with an aspect ratio of 3:1. Experimental results demonstrate that the average transmission for TM wave exceeds 70 %, while the average extinction ratio surpasses 40 dB (10000:1) within the 1 μm to 2.5 μm range. The wire grid polarizer fabricated using the simple and low-cost methods has the potential to become a commercially viable product. [ABSTRACT FROM AUTHOR]
ISSN:00303992
DOI:10.1016/j.optlastec.2025.113099