View in EDS

A low-cost wire grid polarizer with an average extinction ratio of 40 dB in SWIR range realized by oblique angled deposition.

Saved in:
Bibliographic Details
Title: A low-cost wire grid polarizer with an average extinction ratio of 40 dB in SWIR range realized by oblique angled deposition.
Authors: Liu, Xingwei1 (AUTHOR), Lin, Zefan1 (AUTHOR), Zhang, Zhehao1 (AUTHOR), Chai, Yuwei1 (AUTHOR), Wang, Lingxue1 (AUTHOR), Kang, Guoguo1 (AUTHOR) kgg@bit.edu.cn
Source: Optics & Laser Technology. Nov2025, Vol. 189, pN.PAG-N.PAG. 1p.
Subjects: Wave analysis, Lithography, Etching, Metals, Lasers
Abstract: Classical metal wire grid polarizers are commonly employed as infrared polarizers due to their broad operating spectrum. However, their low extinction ratio limits applications in high-precision infrared polarization in short-wavelength infrared range. Analysis using the Rigorous Coupled Wave Analysis indicates that the extinction ratio of a metal wire grid polarizer is positively correlated with the depth of the metal grating layer. Traditional etching and lift-off methods are insufficient for achieving the necessary depth to realize a high extinction ratio. In this paper, we propose an approach to fabricate infrared wire grid polarizers with ultra-high extinction ratios by combining Laser Interference Lithography with Oblique Angled Deposition method. The wire grid polarizer has a periodic structure of 300 nm and a grating layer depth of 450 nm, with an aspect ratio of 3:1. Experimental results demonstrate that the average transmission for TM wave exceeds 70 %, while the average extinction ratio surpasses 40 dB (10000:1) within the 1 μm to 2.5 μm range. The wire grid polarizer fabricated using the simple and low-cost methods has the potential to become a commercially viable product. [ABSTRACT FROM AUTHOR]
Copyright of Optics & Laser Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
FullText Text:
  Availability: 0
Header DbId: egs
DbLabel: Engineering Source
An: 185622237
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: A low-cost wire grid polarizer with an average extinction ratio of 40 dB in SWIR range realized by oblique angled deposition.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Liu%2C+Xingwei%22">Liu, Xingwei</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lin%2C+Zefan%22">Lin, Zefan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zhang%2C+Zhehao%22">Zhang, Zhehao</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chai%2C+Yuwei%22">Chai, Yuwei</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Lingxue%22">Wang, Lingxue</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kang%2C+Guoguo%22">Kang, Guoguo</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> kgg@bit.edu.cn</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Optics+%26+Laser+Technology%22">Optics & Laser Technology</searchLink>. Nov2025, Vol. 189, pN.PAG-N.PAG. 1p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Wave+analysis%22">Wave analysis</searchLink><br /><searchLink fieldCode="DE" term="%22Lithography%22">Lithography</searchLink><br /><searchLink fieldCode="DE" term="%22Etching%22">Etching</searchLink><br /><searchLink fieldCode="DE" term="%22Metals%22">Metals</searchLink><br /><searchLink fieldCode="DE" term="%22Lasers%22">Lasers</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Classical metal wire grid polarizers are commonly employed as infrared polarizers due to their broad operating spectrum. However, their low extinction ratio limits applications in high-precision infrared polarization in short-wavelength infrared range. Analysis using the Rigorous Coupled Wave Analysis indicates that the extinction ratio of a metal wire grid polarizer is positively correlated with the depth of the metal grating layer. Traditional etching and lift-off methods are insufficient for achieving the necessary depth to realize a high extinction ratio. In this paper, we propose an approach to fabricate infrared wire grid polarizers with ultra-high extinction ratios by combining Laser Interference Lithography with Oblique Angled Deposition method. The wire grid polarizer has a periodic structure of 300 nm and a grating layer depth of 450 nm, with an aspect ratio of 3:1. Experimental results demonstrate that the average transmission for TM wave exceeds 70 %, while the average extinction ratio surpasses 40 dB (10000:1) within the 1 μm to 2.5 μm range. The wire grid polarizer fabricated using the simple and low-cost methods has the potential to become a commercially viable product. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Optics & Laser Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=185622237
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.optlastec.2025.113099
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: N.PAG
    Subjects:
      – SubjectFull: Wave analysis
        Type: general
      – SubjectFull: Lithography
        Type: general
      – SubjectFull: Etching
        Type: general
      – SubjectFull: Metals
        Type: general
      – SubjectFull: Lasers
        Type: general
    Titles:
      – TitleFull: A low-cost wire grid polarizer with an average extinction ratio of 40 dB in SWIR range realized by oblique angled deposition.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Liu, Xingwei
      – PersonEntity:
          Name:
            NameFull: Lin, Zefan
      – PersonEntity:
          Name:
            NameFull: Zhang, Zhehao
      – PersonEntity:
          Name:
            NameFull: Chai, Yuwei
      – PersonEntity:
          Name:
            NameFull: Wang, Lingxue
      – PersonEntity:
          Name:
            NameFull: Kang, Guoguo
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 11
              Text: Nov2025
              Type: published
              Y: 2025
          Identifiers:
            – Type: issn-print
              Value: 00303992
          Numbering:
            – Type: volume
              Value: 189
          Titles:
            – TitleFull: Optics & Laser Technology
              Type: main
ResultId 1