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Femtosecond Laser-Based direct fabrication of High-Density convex microlens array on silicon substrates for advanced optoelectronic applications.

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Bibliographic Details
Title:	Femtosecond Laser-Based direct fabrication of High-Density convex microlens array on silicon substrates for advanced optoelectronic applications.
Authors:	Zhao, Bing¹ (AUTHOR), Hu, Jinbing² (AUTHOR), Wang, Guorong¹ (AUTHOR), Lun, Yinghao¹ (AUTHOR), Du, Wenhan¹ (AUTHOR), Zhao, Xiaona¹ (AUTHOR) xiaona.zhao@whu.edu.cn, Wang, Xuan¹ (AUTHOR)
Source:	Optics & Laser Technology. Nov2025, Vol. 189, pN.PAG-N.PAG. 1p.
Subjects:	Infrared array detectors, Bessel beams, Infrared detectors, Focal planes, Focal length
Abstract:	A novel method for fabricating ultrafine, large-area convex microlens array (MLA) on silicon substrates is demonstrated by combining femtosecond laser processing with subsequent wet etching. The resulting MLAs features square aperture with a radius as small as 10 μm and an ultra-short focal length of 30 μm, specifically designed to maximize light concentration onto the sensors of HgCdTe infrared detectors. The square aperture geometry ensures uniform focusing of incident infrared light while preventing sensor damage from excessive energy concentration and effectively utilizing dead zones typically present in circular-aperture designs. Bessel beam was chosen for processing the MLA due to its non-diffraction properties and superior capability compared to the Gaussian beam in shaping microstructures with large depth-to-diameter ratios. The processed MLA enables to collect over 88 % of infrared light onto the infrared focal plane sensors, resulting in nearly a twofold enhancement in effective utilization efficiency (EUE) for the HgCdTe infrared detector. The silicon substrates, after being processed and fully equipped with MLA on their surfaces, are capable of gathering more than 88 % of infrared light and directing it onto the infrared focal plane sensors, resulting in a nearly twofold improvement in the EUE of the HgCdTe infrared detector. These results demonstrate an effective approach for fabricating ultra-small microstructures and hold significant promise for enhancing the energy efficiency of infrared detection systems. [ABSTRACT FROM AUTHOR]
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Database:	Engineering Source

Description
Abstract:	A novel method for fabricating ultrafine, large-area convex microlens array (MLA) on silicon substrates is demonstrated by combining femtosecond laser processing with subsequent wet etching. The resulting MLAs features square aperture with a radius as small as 10 μm and an ultra-short focal length of 30 μm, specifically designed to maximize light concentration onto the sensors of HgCdTe infrared detectors. The square aperture geometry ensures uniform focusing of incident infrared light while preventing sensor damage from excessive energy concentration and effectively utilizing dead zones typically present in circular-aperture designs. Bessel beam was chosen for processing the MLA due to its non-diffraction properties and superior capability compared to the Gaussian beam in shaping microstructures with large depth-to-diameter ratios. The processed MLA enables to collect over 88 % of infrared light onto the infrared focal plane sensors, resulting in nearly a twofold enhancement in effective utilization efficiency (EUE) for the HgCdTe infrared detector. The silicon substrates, after being processed and fully equipped with MLA on their surfaces, are capable of gathering more than 88 % of infrared light and directing it onto the infrared focal plane sensors, resulting in a nearly twofold improvement in the EUE of the HgCdTe infrared detector. These results demonstrate an effective approach for fabricating ultra-small microstructures and hold significant promise for enhancing the energy efficiency of infrared detection systems. [ABSTRACT FROM AUTHOR]
ISSN:	00303992
DOI:	10.1016/j.optlastec.2025.113179