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Dynamic parameter compensation algorithms for periodic nonlinearity errors in spatially separated heterodyne interferometers.

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Title: Dynamic parameter compensation algorithms for periodic nonlinearity errors in spatially separated heterodyne interferometers.
Authors: Guo, ZiWen1,2 (AUTHOR) gzw_999@126.com
Source: Journal of Electromagnetic Waves & Applications. Nov2025, Vol. 39 Issue 17, p2035-2056. 22p.
Subjects: Laser interferometers, Displacement (Mechanics), Measurement errors, Interferometers, Algorithms, Calibration
Abstract: Planar grating interferometric displacement measurement technology, known for its superior resolution and robust environmental adaptability, is crucial in six-degree-of-freedom displacement measurements for ultra-precision motion stages. This study introduces a spatially separated heterodyne grating interferometer to explore the inadequacy of traditional ellipse fitting algorithms caused by non-coaxial transmission of measurement and reference beams. A dynamic parameter PNL error model that integrates random error influences was developed to overcome these limitations. A novel, simplified real-time compensation algorithm for constant parameter PNL is proposed to enhance hardware feasibility and computational efficiency. Furthermore, an advanced algorithm for dynamic parameter PNL was designed, achieving real-time calibration and significant reduction of dynamic parameter PNL error from 11 nm to 20 pm. This advancement crucially addresses the challenge of attaining high-speed, high-acceleration displacement measurements with sub-nanometer precision using laser interferometers. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:Planar grating interferometric displacement measurement technology, known for its superior resolution and robust environmental adaptability, is crucial in six-degree-of-freedom displacement measurements for ultra-precision motion stages. This study introduces a spatially separated heterodyne grating interferometer to explore the inadequacy of traditional ellipse fitting algorithms caused by non-coaxial transmission of measurement and reference beams. A dynamic parameter PNL error model that integrates random error influences was developed to overcome these limitations. A novel, simplified real-time compensation algorithm for constant parameter PNL is proposed to enhance hardware feasibility and computational efficiency. Furthermore, an advanced algorithm for dynamic parameter PNL was designed, achieving real-time calibration and significant reduction of dynamic parameter PNL error from 11 nm to 20 pm. This advancement crucially addresses the challenge of attaining high-speed, high-acceleration displacement measurements with sub-nanometer precision using laser interferometers. [ABSTRACT FROM AUTHOR]
ISSN:09205071
DOI:10.1080/09205071.2025.2535651