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Dynamic parameter compensation algorithms for periodic nonlinearity errors in spatially separated heterodyne interferometers.

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Title: Dynamic parameter compensation algorithms for periodic nonlinearity errors in spatially separated heterodyne interferometers.
Authors: Guo, ZiWen1,2 (AUTHOR) gzw_999@126.com
Source: Journal of Electromagnetic Waves & Applications. Nov2025, Vol. 39 Issue 17, p2035-2056. 22p.
Subjects: Laser interferometers, Displacement (Mechanics), Measurement errors, Interferometers, Algorithms, Calibration
Abstract: Planar grating interferometric displacement measurement technology, known for its superior resolution and robust environmental adaptability, is crucial in six-degree-of-freedom displacement measurements for ultra-precision motion stages. This study introduces a spatially separated heterodyne grating interferometer to explore the inadequacy of traditional ellipse fitting algorithms caused by non-coaxial transmission of measurement and reference beams. A dynamic parameter PNL error model that integrates random error influences was developed to overcome these limitations. A novel, simplified real-time compensation algorithm for constant parameter PNL is proposed to enhance hardware feasibility and computational efficiency. Furthermore, an advanced algorithm for dynamic parameter PNL was designed, achieving real-time calibration and significant reduction of dynamic parameter PNL error from 11 nm to 20 pm. This advancement crucially addresses the challenge of attaining high-speed, high-acceleration displacement measurements with sub-nanometer precision using laser interferometers. [ABSTRACT FROM AUTHOR]
Copyright of Journal of Electromagnetic Waves & Applications is the property of Taylor & Francis Ltd and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 189082144
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Dynamic parameter compensation algorithms for periodic nonlinearity errors in spatially separated heterodyne interferometers.
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  Data: <searchLink fieldCode="AR" term="%22Guo%2C+ZiWen%22">Guo, ZiWen</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> gzw_999@126.com</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Electromagnetic+Waves+%26+Applications%22">Journal of Electromagnetic Waves & Applications</searchLink>. Nov2025, Vol. 39 Issue 17, p2035-2056. 22p.
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  Data: <searchLink fieldCode="DE" term="%22Laser+interferometers%22">Laser interferometers</searchLink><br /><searchLink fieldCode="DE" term="%22Displacement+%28Mechanics%29%22">Displacement (Mechanics)</searchLink><br /><searchLink fieldCode="DE" term="%22Measurement+errors%22">Measurement errors</searchLink><br /><searchLink fieldCode="DE" term="%22Interferometers%22">Interferometers</searchLink><br /><searchLink fieldCode="DE" term="%22Algorithms%22">Algorithms</searchLink><br /><searchLink fieldCode="DE" term="%22Calibration%22">Calibration</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Planar grating interferometric displacement measurement technology, known for its superior resolution and robust environmental adaptability, is crucial in six-degree-of-freedom displacement measurements for ultra-precision motion stages. This study introduces a spatially separated heterodyne grating interferometer to explore the inadequacy of traditional ellipse fitting algorithms caused by non-coaxial transmission of measurement and reference beams. A dynamic parameter PNL error model that integrates random error influences was developed to overcome these limitations. A novel, simplified real-time compensation algorithm for constant parameter PNL is proposed to enhance hardware feasibility and computational efficiency. Furthermore, an advanced algorithm for dynamic parameter PNL was designed, achieving real-time calibration and significant reduction of dynamic parameter PNL error from 11 nm to 20 pm. This advancement crucially addresses the challenge of attaining high-speed, high-acceleration displacement measurements with sub-nanometer precision using laser interferometers. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Electromagnetic Waves & Applications is the property of Taylor & Francis Ltd and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1080/09205071.2025.2535651
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 22
        StartPage: 2035
    Subjects:
      – SubjectFull: Laser interferometers
        Type: general
      – SubjectFull: Displacement (Mechanics)
        Type: general
      – SubjectFull: Measurement errors
        Type: general
      – SubjectFull: Interferometers
        Type: general
      – SubjectFull: Algorithms
        Type: general
      – SubjectFull: Calibration
        Type: general
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      – TitleFull: Dynamic parameter compensation algorithms for periodic nonlinearity errors in spatially separated heterodyne interferometers.
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              Text: Nov2025
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              Y: 2025
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              Value: 39
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            – TitleFull: Journal of Electromagnetic Waves & Applications
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