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Discharge-mode effects on TiBx coatings: Benchmarking dcMS/mfMS/HiPIMS against arc mixed-mode HiPIMS.

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Title: Discharge-mode effects on TiBx coatings: Benchmarking dcMS/mfMS/HiPIMS against arc mixed-mode HiPIMS.
Authors: Tang, Jian-Fu1 (AUTHOR), Yang, Yi-Hsiang2 (AUTHOR), Yang, Fu-Sen3,4 (AUTHOR), Chang, Chi-Lung1,2,4 (AUTHOR) clchang@mail.mcut.edu.tw
Source: Surface & Coatings Technology. Apr2026, Vol. 526, pN.PAG-N.PAG. 1p.
Subjects: Protective coatings, Magnetron sputtering, Wear resistance, Plasma density
Abstract: Ultra-high plasma density in a scalable mixed-mode high-power impulse magnetron sputtering with arc discharge (arc mixed-mode HiPIMS) enables the deposition of dense, superhard TiB x coatings with outstanding mechanical and tribological performance. The scientific objective of this work is to clarify why and how different sputtering modes produce distinct structure–property outcomes by systematically comparing dcMS, mfMS, standard HiPIMS, and arc mixed-mode HiPIMS using a six-inch TiB 2 target. Waveform analysis and plasma diagnostics reveal that arc mixed-mode HiPIMS increases plasma power density to 8.257 kW cm−2 and delivers a strong high-energy ion flux (>80 eV), far beyond conventional modes. This intensification refines the microstructure, promotes a strong (001) texture, induces high compressive stress (up to −3.84 GPa), and drives Ti enrichment (B/Ti: 2.87 → 2.28). Consequently, the coatings achieve a hardness of 48.9 ± 1.0 GPa, an adhesive critical load of L C2 > 100 N (HF1), and a strongly reduced wear rate of 0.65 × 10−6 mm3·N−1 m−1, despite slightly higher friction coefficients than dcMS/mfMS coatings. These results identify plasma energy density as a key governor of TiB x densification, interfacial integrity, and tribological superiority, providing a practical route for next-generation hard protective coatings. • Mixed mode HiPIMS+Arc reaches 8.257 kWcm−2 and strong >80 eV ion flux. • Dense, (001)-textured TiB x forms with compressive stress up to −3.84 GPa. • High-ionization growth enriches Ti, reducing B/Ti from 2.87 to 2.28. • Superhardness 48.9 GPa and adhesion L C2 >100 N (HF1). • Wear rate reduced to 0.65 × 10−6 mm3 N−1 m−1 under arc mixed mode HiPIMS. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:Ultra-high plasma density in a scalable mixed-mode high-power impulse magnetron sputtering with arc discharge (arc mixed-mode HiPIMS) enables the deposition of dense, superhard TiB x coatings with outstanding mechanical and tribological performance. The scientific objective of this work is to clarify why and how different sputtering modes produce distinct structure–property outcomes by systematically comparing dcMS, mfMS, standard HiPIMS, and arc mixed-mode HiPIMS using a six-inch TiB 2 target. Waveform analysis and plasma diagnostics reveal that arc mixed-mode HiPIMS increases plasma power density to 8.257 kW cm−2 and delivers a strong high-energy ion flux (>80 eV), far beyond conventional modes. This intensification refines the microstructure, promotes a strong (001) texture, induces high compressive stress (up to −3.84 GPa), and drives Ti enrichment (B/Ti: 2.87 → 2.28). Consequently, the coatings achieve a hardness of 48.9 ± 1.0 GPa, an adhesive critical load of L C2 > 100 N (HF1), and a strongly reduced wear rate of 0.65 × 10−6 mm3·N−1 m−1, despite slightly higher friction coefficients than dcMS/mfMS coatings. These results identify plasma energy density as a key governor of TiB x densification, interfacial integrity, and tribological superiority, providing a practical route for next-generation hard protective coatings. • Mixed mode HiPIMS+Arc reaches 8.257 kWcm−2 and strong >80 eV ion flux. • Dense, (001)-textured TiB x forms with compressive stress up to −3.84 GPa. • High-ionization growth enriches Ti, reducing B/Ti from 2.87 to 2.28. • Superhardness 48.9 GPa and adhesion L C2 >100 N (HF1). • Wear rate reduced to 0.65 × 10−6 mm3 N−1 m−1 under arc mixed mode HiPIMS. [ABSTRACT FROM AUTHOR]
ISSN:02578972
DOI:10.1016/j.surfcoat.2026.133367