Discharge-mode effects on TiBx coatings: Benchmarking dcMS/mfMS/HiPIMS against arc mixed-mode HiPIMS.
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| Title: | Discharge-mode effects on TiBx coatings: Benchmarking dcMS/mfMS/HiPIMS against arc mixed-mode HiPIMS. |
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| Authors: | Tang, Jian-Fu1 (AUTHOR), Yang, Yi-Hsiang2 (AUTHOR), Yang, Fu-Sen3,4 (AUTHOR), Chang, Chi-Lung1,2,4 (AUTHOR) clchang@mail.mcut.edu.tw |
| Source: | Surface & Coatings Technology. Apr2026, Vol. 526, pN.PAG-N.PAG. 1p. |
| Subjects: | Protective coatings, Magnetron sputtering, Wear resistance, Plasma density |
| Abstract: | Ultra-high plasma density in a scalable mixed-mode high-power impulse magnetron sputtering with arc discharge (arc mixed-mode HiPIMS) enables the deposition of dense, superhard TiB x coatings with outstanding mechanical and tribological performance. The scientific objective of this work is to clarify why and how different sputtering modes produce distinct structure–property outcomes by systematically comparing dcMS, mfMS, standard HiPIMS, and arc mixed-mode HiPIMS using a six-inch TiB 2 target. Waveform analysis and plasma diagnostics reveal that arc mixed-mode HiPIMS increases plasma power density to 8.257 kW cm−2 and delivers a strong high-energy ion flux (>80 eV), far beyond conventional modes. This intensification refines the microstructure, promotes a strong (001) texture, induces high compressive stress (up to −3.84 GPa), and drives Ti enrichment (B/Ti: 2.87 → 2.28). Consequently, the coatings achieve a hardness of 48.9 ± 1.0 GPa, an adhesive critical load of L C2 > 100 N (HF1), and a strongly reduced wear rate of 0.65 × 10−6 mm3·N−1 m−1, despite slightly higher friction coefficients than dcMS/mfMS coatings. These results identify plasma energy density as a key governor of TiB x densification, interfacial integrity, and tribological superiority, providing a practical route for next-generation hard protective coatings. • Mixed mode HiPIMS+Arc reaches 8.257 kWcm−2 and strong >80 eV ion flux. • Dense, (001)-textured TiB x forms with compressive stress up to −3.84 GPa. • High-ionization growth enriches Ti, reducing B/Ti from 2.87 to 2.28. • Superhardness 48.9 GPa and adhesion L C2 >100 N (HF1). • Wear rate reduced to 0.65 × 10−6 mm3 N−1 m−1 under arc mixed mode HiPIMS. [ABSTRACT FROM AUTHOR] |
| Copyright of Surface & Coatings Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 192377542 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Discharge-mode effects on TiBx coatings: Benchmarking dcMS/mfMS/HiPIMS against arc mixed-mode HiPIMS. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Tang%2C+Jian-Fu%22">Tang, Jian-Fu</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Yang%2C+Yi-Hsiang%22">Yang, Yi-Hsiang</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Yang%2C+Fu-Sen%22">Yang, Fu-Sen</searchLink><relatesTo>3,4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chang%2C+Chi-Lung%22">Chang, Chi-Lung</searchLink><relatesTo>1,2,4</relatesTo> (AUTHOR)<i> clchang@mail.mcut.edu.tw</i> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Surface+%26+Coatings+Technology%22">Surface & Coatings Technology</searchLink>. Apr2026, Vol. 526, pN.PAG-N.PAG. 1p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Protective+coatings%22">Protective coatings</searchLink><br /><searchLink fieldCode="DE" term="%22Magnetron+sputtering%22">Magnetron sputtering</searchLink><br /><searchLink fieldCode="DE" term="%22Wear+resistance%22">Wear resistance</searchLink><br /><searchLink fieldCode="DE" term="%22Plasma+density%22">Plasma density</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: Ultra-high plasma density in a scalable mixed-mode high-power impulse magnetron sputtering with arc discharge (arc mixed-mode HiPIMS) enables the deposition of dense, superhard TiB x coatings with outstanding mechanical and tribological performance. The scientific objective of this work is to clarify why and how different sputtering modes produce distinct structure–property outcomes by systematically comparing dcMS, mfMS, standard HiPIMS, and arc mixed-mode HiPIMS using a six-inch TiB 2 target. Waveform analysis and plasma diagnostics reveal that arc mixed-mode HiPIMS increases plasma power density to 8.257 kW cm−2 and delivers a strong high-energy ion flux (>80 eV), far beyond conventional modes. This intensification refines the microstructure, promotes a strong (001) texture, induces high compressive stress (up to −3.84 GPa), and drives Ti enrichment (B/Ti: 2.87 → 2.28). Consequently, the coatings achieve a hardness of 48.9 ± 1.0 GPa, an adhesive critical load of L C2 > 100 N (HF1), and a strongly reduced wear rate of 0.65 × 10−6 mm3·N−1 m−1, despite slightly higher friction coefficients than dcMS/mfMS coatings. These results identify plasma energy density as a key governor of TiB x densification, interfacial integrity, and tribological superiority, providing a practical route for next-generation hard protective coatings. • Mixed mode HiPIMS+Arc reaches 8.257 kWcm−2 and strong >80 eV ion flux. • Dense, (001)-textured TiB x forms with compressive stress up to −3.84 GPa. • High-ionization growth enriches Ti, reducing B/Ti from 2.87 to 2.28. • Superhardness 48.9 GPa and adhesion L C2 >100 N (HF1). • Wear rate reduced to 0.65 × 10−6 mm3 N−1 m−1 under arc mixed mode HiPIMS. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Surface & Coatings Technology is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.surfcoat.2026.133367 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 1 StartPage: N.PAG Subjects: – SubjectFull: Protective coatings Type: general – SubjectFull: Magnetron sputtering Type: general – SubjectFull: Wear resistance Type: general – SubjectFull: Plasma density Type: general Titles: – TitleFull: Discharge-mode effects on TiBx coatings: Benchmarking dcMS/mfMS/HiPIMS against arc mixed-mode HiPIMS. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Tang, Jian-Fu – PersonEntity: Name: NameFull: Yang, Yi-Hsiang – PersonEntity: Name: NameFull: Yang, Fu-Sen – PersonEntity: Name: NameFull: Chang, Chi-Lung IsPartOfRelationships: – BibEntity: Dates: – D: 15 M: 04 Text: Apr2026 Type: published Y: 2026 Identifiers: – Type: issn-print Value: 02578972 Numbering: – Type: volume Value: 526 Titles: – TitleFull: Surface & Coatings Technology Type: main |
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