View in EDS

Structure and inconel 718 cutting of (TiW)N films prepared by reactive sputtering.

Saved in:
Bibliographic Details
Title: Structure and inconel 718 cutting of (TiW)N films prepared by reactive sputtering.
Authors: Shen, Yu-Kai1 (AUTHOR), Chang, Tien-Li2 (AUTHOR) tlchang@ntnu.edu.tw, Wu, Shu-Ping3 (AUTHOR), Huang, Ya-Ge1 (AUTHOR), Hsu, Chun-Yao1,3 (AUTHOR) cyhsu@mail.lhu.edu.tw
Source: International Journal of Advanced Manufacturing Technology. Apr2026, Vol. 143 Issue 7/8, p4093-4107. 15p.
Subjects: Cutting (Materials), Reactive sputtering, Thin film crystallography, Ceramic coating, Milling-machines, Corrosion resistance, Heat treatment, Mechanical behavior of materials
Abstract: Ternary (TiW)N nitride films were deposited onto cutting tool inserts, SUS 304, and glass substrates by a reactive co-sputtering system. The effect of fabrication parameters (deposition time, N2/(Ar + N2) flow rate, and annealing treatment) on structure, morphology, mechanical properties, and corrosion resistance was investigated. In addition, dry milling of Inconel 718 with a (TiW)N film-coated tool was also analyzed. The analysis shows that (TiW)N crystallizes in the face-centered cubic structure, corresponding to diffraction along the (111), (200), (220), and (311) planes, with the strongest peak of the (111) plane. The results show that as the deposition time increases, the mechanical and tribological properties as well as the corrosion resistance are enhanced due to the improvement of the crystal quality of the (TiW)N thin film. As the N2(Ar + N2) flow rate increases from 8% to 16%, the hardness, elastic modulus, and elastic recovery value increase from 17.89 to 23.76 GPa, 120.8 to 139.6 GPa, and 60.49 to 62.72%, respectively. As expected, dry milling performance is improves when the tool has a protective (TiW)N coated film, and the results show that coated tools have a longer service life than uncoated tools. After annealing, an oxide layer forms on the surface, reducing the film's mechanical properties and corrosion resistance. [ABSTRACT FROM AUTHOR]
Copyright of International Journal of Advanced Manufacturing Technology is the property of Springer Nature and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
Description
Abstract:Ternary (TiW)N nitride films were deposited onto cutting tool inserts, SUS 304, and glass substrates by a reactive co-sputtering system. The effect of fabrication parameters (deposition time, N2/(Ar + N2) flow rate, and annealing treatment) on structure, morphology, mechanical properties, and corrosion resistance was investigated. In addition, dry milling of Inconel 718 with a (TiW)N film-coated tool was also analyzed. The analysis shows that (TiW)N crystallizes in the face-centered cubic structure, corresponding to diffraction along the (111), (200), (220), and (311) planes, with the strongest peak of the (111) plane. The results show that as the deposition time increases, the mechanical and tribological properties as well as the corrosion resistance are enhanced due to the improvement of the crystal quality of the (TiW)N thin film. As the N2(Ar + N2) flow rate increases from 8% to 16%, the hardness, elastic modulus, and elastic recovery value increase from 17.89 to 23.76 GPa, 120.8 to 139.6 GPa, and 60.49 to 62.72%, respectively. As expected, dry milling performance is improves when the tool has a protective (TiW)N coated film, and the results show that coated tools have a longer service life than uncoated tools. After annealing, an oxide layer forms on the surface, reducing the film's mechanical properties and corrosion resistance. [ABSTRACT FROM AUTHOR]
ISSN:02683768
DOI:10.1007/s00170-026-17605-9