Achieving ultralow resistance drift and enhanced thermal stability in Ti-doped GeSb9 alloys for phase-change memory.

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Title: Achieving ultralow resistance drift and enhanced thermal stability in Ti-doped GeSb9 alloys for phase-change memory.
Authors: Yang, Zilin1 (AUTHOR), Wang, Guoxiang1,2,3 (AUTHOR) wangguoxiang@nbu.edu.cn, Wu, Tong1 (AUTHOR), Chen, Yingqi1 (AUTHOR), Wang, Haohao1 (AUTHOR), Chen, Mengli1 (AUTHOR), He, Anyi1 (AUTHOR)
Source: Ceramics International. Jun2026:Part B, Vol. 52 Issue 14, p25034-25041. 8p.
Subjects: Thermal stability, Phase change memory, X-ray photoelectron spectroscopy, Crystallization, Magnetron sputtering, Phase change materials, Raman spectroscopy, Electric properties
Abstract: GeSb 9 and Ti-doped GeSb 9 phase-change thin films were fabricated by magnetron sputtering, and the relationship between resistance drift behavior and crystallization characteristics was systematically investigated. The results indicate that when the Ti doping concentration reaches 13.11 at. %, the Ti 13.11 (GeSb 9) 86.89 film exhibits excellent thermal stability, with a crystallization temperature of 235 °C and a ten-year data retention temperature of 156.8 °C. The resistance drift coefficient is markedly reduced from 0.00192 for pure GeSb 9 to 0.00011 for the Ti 13.11 (GeSb 9) 86.89 film. Raman spectroscopy analysis reveals that Ti doping effectively suppresses the growth of large grains in the GeSb 9 matrix. Furthermore, Ti doping reduced the crystallization kinetics exponent (n), thereby effectively regulating the nucleation and grain-growth processes and rendering the crystallization mechanism more controllable. XPS reveals the existence of strong Ti-Sb bonds in Ti-doped GeSb 9 films. Microstructural analysis reveals that the addition of Ti inhibits grain growth, while Ti-Sb bonds stabilize the amorphous regions, thus improving the amorphous phase stability. We conclude that the strong Ti-Sb bonds form the microscopic basis for the enhanced thermal stability and low resistance drift in Ti-doped GeSb 9 films, providing valuable insights for improving the performance of antimony-based phase-change materials. [ABSTRACT FROM AUTHOR]
Copyright of Ceramics International is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Achieving ultralow resistance drift and enhanced thermal stability in Ti-doped GeSb9 alloys for phase-change memory.
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  Data: <searchLink fieldCode="AR" term="%22Yang%2C+Zilin%22">Yang, Zilin</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Guoxiang%22">Wang, Guoxiang</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<i> wangguoxiang@nbu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Wu%2C+Tong%22">Wu, Tong</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chen%2C+Yingqi%22">Chen, Yingqi</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Haohao%22">Wang, Haohao</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chen%2C+Mengli%22">Chen, Mengli</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22He%2C+Anyi%22">He, Anyi</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Ceramics+International%22">Ceramics International</searchLink>. Jun2026:Part B, Vol. 52 Issue 14, p25034-25041. 8p.
– Name: Subject
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  Data: <searchLink fieldCode="DE" term="%22Thermal+stability%22">Thermal stability</searchLink><br /><searchLink fieldCode="DE" term="%22Phase+change+memory%22">Phase change memory</searchLink><br /><searchLink fieldCode="DE" term="%22X-ray+photoelectron+spectroscopy%22">X-ray photoelectron spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Crystallization%22">Crystallization</searchLink><br /><searchLink fieldCode="DE" term="%22Magnetron+sputtering%22">Magnetron sputtering</searchLink><br /><searchLink fieldCode="DE" term="%22Phase+change+materials%22">Phase change materials</searchLink><br /><searchLink fieldCode="DE" term="%22Raman+spectroscopy%22">Raman spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Electric+properties%22">Electric properties</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: GeSb 9 and Ti-doped GeSb 9 phase-change thin films were fabricated by magnetron sputtering, and the relationship between resistance drift behavior and crystallization characteristics was systematically investigated. The results indicate that when the Ti doping concentration reaches 13.11 at. %, the Ti 13.11 (GeSb 9) 86.89 film exhibits excellent thermal stability, with a crystallization temperature of 235 °C and a ten-year data retention temperature of 156.8 °C. The resistance drift coefficient is markedly reduced from 0.00192 for pure GeSb 9 to 0.00011 for the Ti 13.11 (GeSb 9) 86.89 film. Raman spectroscopy analysis reveals that Ti doping effectively suppresses the growth of large grains in the GeSb 9 matrix. Furthermore, Ti doping reduced the crystallization kinetics exponent (n), thereby effectively regulating the nucleation and grain-growth processes and rendering the crystallization mechanism more controllable. XPS reveals the existence of strong Ti-Sb bonds in Ti-doped GeSb 9 films. Microstructural analysis reveals that the addition of Ti inhibits grain growth, while Ti-Sb bonds stabilize the amorphous regions, thus improving the amorphous phase stability. We conclude that the strong Ti-Sb bonds form the microscopic basis for the enhanced thermal stability and low resistance drift in Ti-doped GeSb 9 films, providing valuable insights for improving the performance of antimony-based phase-change materials. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Ceramics International is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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      – Type: doi
        Value: 10.1016/j.ceramint.2026.04.163
    Languages:
      – Code: eng
        Text: English
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        PageCount: 8
        StartPage: 25034
    Subjects:
      – SubjectFull: Thermal stability
        Type: general
      – SubjectFull: Phase change memory
        Type: general
      – SubjectFull: X-ray photoelectron spectroscopy
        Type: general
      – SubjectFull: Crystallization
        Type: general
      – SubjectFull: Magnetron sputtering
        Type: general
      – SubjectFull: Phase change materials
        Type: general
      – SubjectFull: Raman spectroscopy
        Type: general
      – SubjectFull: Electric properties
        Type: general
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      – TitleFull: Achieving ultralow resistance drift and enhanced thermal stability in Ti-doped GeSb9 alloys for phase-change memory.
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            NameFull: Yang, Zilin
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            NameFull: Wu, Tong
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            – D: 05
              M: 06
              Text: Jun2026:Part B
              Type: published
              Y: 2026
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