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Influences of sputtered crater geometry on glow discharge spectrometry depth profile.

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Title: Influences of sputtered crater geometry on glow discharge spectrometry depth profile.
Authors: Liu, Gong-Wen1 (AUTHOR), Tan, Zhi-Rou1 (AUTHOR), Guo, Rong-Rong2 (AUTHOR), Huang, Wei-Nan1 (AUTHOR), Li, Yu3 (AUTHOR), Lian, Song-You1 (AUTHOR) sylian1@stu.edu.cn, Wang, Jiang-Yong1,4 (AUTHOR) 15017214200@163.com
Source: Microchemical Journal. Jul2026, Vol. 226, pN.PAG-N.PAG. 1p.
Subjects: Glow discharges, Depth profiling
Abstract: In this paper, the mixing-roughness-information-CRAter-simulation (MRI-CRAS) model for the quantification of glow discharge spectrometry (GDS) depth profile is firstly revisited by introducing a visualized crater shape. Based on the MRI-CRAS model, the influences of sputtered crater on GDS depth profile are evaluated quantitatively. The gradual decrease of the signal plateau, the changes in the up/down slope, peak shift, and the 'sudden·inflection points' upon GDS depth profiling are well explained through the evolution of the corresponding crater shape. Then, a guideline for quantifying measured GDS depth profile is proposed without requiring prior optimization of working conditions. Finally, as an example, the depth profile of Si/Al multilayer measured by radio frequency glow discharge optical emission spectroscopy (RF-GDOES) is quantitatively evaluated. The computational program developed in this work has been made openly available on GitHub to facilitate reproducibility and further applications [Display omitted] • The impact of sputtered crater geometry on depth profile is quantitatively evaluated. • Crater shape causes peak shifts and slope changes in depth profiles. • "Sudden inflection point" is explained by crater evolution across layer interface. • A visual mechanism clarifies how crater shape distorts the measured depth profile. • A guideline is proposed to quantify depth profile without optimizing work conditions. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:In this paper, the mixing-roughness-information-CRAter-simulation (MRI-CRAS) model for the quantification of glow discharge spectrometry (GDS) depth profile is firstly revisited by introducing a visualized crater shape. Based on the MRI-CRAS model, the influences of sputtered crater on GDS depth profile are evaluated quantitatively. The gradual decrease of the signal plateau, the changes in the up/down slope, peak shift, and the 'sudden·inflection points' upon GDS depth profiling are well explained through the evolution of the corresponding crater shape. Then, a guideline for quantifying measured GDS depth profile is proposed without requiring prior optimization of working conditions. Finally, as an example, the depth profile of Si/Al multilayer measured by radio frequency glow discharge optical emission spectroscopy (RF-GDOES) is quantitatively evaluated. The computational program developed in this work has been made openly available on GitHub to facilitate reproducibility and further applications [Display omitted] • The impact of sputtered crater geometry on depth profile is quantitatively evaluated. • Crater shape causes peak shifts and slope changes in depth profiles. • "Sudden inflection point" is explained by crater evolution across layer interface. • A visual mechanism clarifies how crater shape distorts the measured depth profile. • A guideline is proposed to quantify depth profile without optimizing work conditions. [ABSTRACT FROM AUTHOR]
ISSN:0026265X
DOI:10.1016/j.microc.2026.118471