Fabrication of nanoelectromechanical resonators using a cryogenic etching technique.
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| Title: | Fabrication of nanoelectromechanical resonators using a cryogenic etching technique. |
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| Authors: | Nelson-Fitzpatrick, N.1,2, Westra, K.3, Li, P.4, McColman, S.3, Wilding, N.1,2, Evoy, S.1,2 evoy@ece.ualberta.ca |
| Source: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures. Nov/Dec2006, Vol. 24 Issue 6, p2769-2771. 3p. 1 Black and White Photograph, 1 Diagram, 2 Charts, 1 Graph. |
| Subjects: | Cryoelectronics, Etching, Electric resonators, Machining, Low temperature engineering |
| Abstract: | The article presents a study which explored the application of cryogenic etching for the machining of released high-aspect-ratio nanoelectromechanical systems resonators. The cryogenic nanomechanical etching methodology is described in detail. The preliminary characterization of resonators machined in such a way is reported. The conclusion of the study is stated. |
| Database: | Engineering Source |
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