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Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen

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Title: Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen
Authors: Scheffe, Jonathan R.1, Francés, Andrea1,2, King, David M.1, Liang, Xinhua1, Branch, Brittany A.1, Cavanagh, Andrew S.1,3, George, Steven M.1,3, Weimer, Alan W.1 Alan.Weimer@Colorado.edu
Source: Thin Solid Films. Jan2009, Vol. 517 Issue 6, p1874-1879. 6p.
Subjects: Thin films, Coating processes, Fluidized reactors, Ferrocene, Nanoparticles, Zirconium oxide, Iron oxides
Abstract: Abstract: Conformal films of amorphous iron(III) oxide and α-Fe2O3 have been coated on zirconia nanoparticles (26 nm) in a fluidized bed reactor by atomic layer deposition. Ferrocene and oxygen were alternately dosed into the reactor at temperatures between 367 °C and 534 °C. Self-limiting chemistry was observed via in situ mass spectrometry, and by means of induced coupled plasma-atomic emission spectroscopy analysis. Film conformality and uniformity were verified by high resolution transmission electron microscopy, and the growth rate was determined to be 0.15 Å per cycle. Energy dispersive spectroscopy, X-ray diffractometry, and X-ray photoelectron spectroscopy were utilized as a means to determine film composition at each deposition temperature. Over all of the deposition temperatures investigated, films were deposited as amorphous iron(III) oxide. However, after heat treatment at 850 °C in air and N2 atmospheres, α-Fe2O3 was the predominant species. [Copyright &y& Elsevier]
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Database: Engineering Source
Description
Abstract:Abstract: Conformal films of amorphous iron(III) oxide and α-Fe2O3 have been coated on zirconia nanoparticles (26 nm) in a fluidized bed reactor by atomic layer deposition. Ferrocene and oxygen were alternately dosed into the reactor at temperatures between 367 °C and 534 °C. Self-limiting chemistry was observed via in situ mass spectrometry, and by means of induced coupled plasma-atomic emission spectroscopy analysis. Film conformality and uniformity were verified by high resolution transmission electron microscopy, and the growth rate was determined to be 0.15 Å per cycle. Energy dispersive spectroscopy, X-ray diffractometry, and X-ray photoelectron spectroscopy were utilized as a means to determine film composition at each deposition temperature. Over all of the deposition temperatures investigated, films were deposited as amorphous iron(III) oxide. However, after heat treatment at 850 °C in air and N2 atmospheres, α-Fe2O3 was the predominant species. [Copyright &y& Elsevier]
ISSN:00406090
DOI:10.1016/j.tsf.2008.09.086