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Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen

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Title: Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen
Authors: Scheffe, Jonathan R.1, Francés, Andrea1,2, King, David M.1, Liang, Xinhua1, Branch, Brittany A.1, Cavanagh, Andrew S.1,3, George, Steven M.1,3, Weimer, Alan W.1 Alan.Weimer@Colorado.edu
Source: Thin Solid Films. Jan2009, Vol. 517 Issue 6, p1874-1879. 6p.
Subjects: Thin films, Coating processes, Fluidized reactors, Ferrocene, Nanoparticles, Zirconium oxide, Iron oxides
Abstract: Abstract: Conformal films of amorphous iron(III) oxide and α-Fe2O3 have been coated on zirconia nanoparticles (26 nm) in a fluidized bed reactor by atomic layer deposition. Ferrocene and oxygen were alternately dosed into the reactor at temperatures between 367 °C and 534 °C. Self-limiting chemistry was observed via in situ mass spectrometry, and by means of induced coupled plasma-atomic emission spectroscopy analysis. Film conformality and uniformity were verified by high resolution transmission electron microscopy, and the growth rate was determined to be 0.15 Å per cycle. Energy dispersive spectroscopy, X-ray diffractometry, and X-ray photoelectron spectroscopy were utilized as a means to determine film composition at each deposition temperature. Over all of the deposition temperatures investigated, films were deposited as amorphous iron(III) oxide. However, after heat treatment at 850 °C in air and N2 atmospheres, α-Fe2O3 was the predominant species. [Copyright &y& Elsevier]
Copyright of Thin Solid Films is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
FullText Text:
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Header DbId: egs
DbLabel: Engineering Source
An: 36015210
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen
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  Data: <searchLink fieldCode="AR" term="%22Scheffe%2C+Jonathan+R%2E%22">Scheffe, Jonathan R.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Francés%2C+Andrea%22">Francés, Andrea</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AR" term="%22King%2C+David+M%2E%22">King, David M.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Liang%2C+Xinhua%22">Liang, Xinhua</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Branch%2C+Brittany+A%2E%22">Branch, Brittany A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Cavanagh%2C+Andrew+S%2E%22">Cavanagh, Andrew S.</searchLink><relatesTo>1,3</relatesTo><br /><searchLink fieldCode="AR" term="%22George%2C+Steven+M%2E%22">George, Steven M.</searchLink><relatesTo>1,3</relatesTo><br /><searchLink fieldCode="AR" term="%22Weimer%2C+Alan+W%2E%22">Weimer, Alan W.</searchLink><relatesTo>1</relatesTo><i> Alan.Weimer@Colorado.edu</i>
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  Data: <searchLink fieldCode="JN" term="%22Thin+Solid+Films%22">Thin Solid Films</searchLink>. Jan2009, Vol. 517 Issue 6, p1874-1879. 6p.
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  Data: <searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Coating+processes%22">Coating processes</searchLink><br /><searchLink fieldCode="DE" term="%22Fluidized+reactors%22">Fluidized reactors</searchLink><br /><searchLink fieldCode="DE" term="%22Ferrocene%22">Ferrocene</searchLink><br /><searchLink fieldCode="DE" term="%22Nanoparticles%22">Nanoparticles</searchLink><br /><searchLink fieldCode="DE" term="%22Zirconium+oxide%22">Zirconium oxide</searchLink><br /><searchLink fieldCode="DE" term="%22Iron+oxides%22">Iron oxides</searchLink>
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  Data: Abstract: Conformal films of amorphous iron(III) oxide and α-Fe2O3 have been coated on zirconia nanoparticles (26 nm) in a fluidized bed reactor by atomic layer deposition. Ferrocene and oxygen were alternately dosed into the reactor at temperatures between 367 °C and 534 °C. Self-limiting chemistry was observed via in situ mass spectrometry, and by means of induced coupled plasma-atomic emission spectroscopy analysis. Film conformality and uniformity were verified by high resolution transmission electron microscopy, and the growth rate was determined to be 0.15 Å per cycle. Energy dispersive spectroscopy, X-ray diffractometry, and X-ray photoelectron spectroscopy were utilized as a means to determine film composition at each deposition temperature. Over all of the deposition temperatures investigated, films were deposited as amorphous iron(III) oxide. However, after heat treatment at 850 °C in air and N2 atmospheres, α-Fe2O3 was the predominant species. [Copyright &y& Elsevier]
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  Data: <i>Copyright of Thin Solid Films is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.tsf.2008.09.086
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        Text: English
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      – SubjectFull: Ferrocene
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      – SubjectFull: Nanoparticles
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      – SubjectFull: Zirconium oxide
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      – SubjectFull: Iron oxides
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      – TitleFull: Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen
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              Text: Jan2009
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