Bibliographic Details
| Title: |
Silicon microelement vibration testing using conventional and heterodyned time-average interferometry with automated temporal and spatial phase stepping |
| Authors: |
Styk, Adam1, Patorski, Krzysztof k.patorski@mchtr.pw.edu.pl |
| Source: |
Optics & Lasers in Engineering. Mar2009, Vol. 47 Issue 3/4, p504-511. 8p. |
| Subjects: |
Vibration measurements, Interferometry, Diffraction patterns, Mathematical formulas |
| Abstract: |
Abstract: This paper focuses on the applicability of the temporal (TPS) and spatial carrier (SCPS) phase-shifting techniques to the time-average interferogram intensity modulation distribution determination. Both techniques use the same mathematical formulae, but in different domains: temporal and spatial ones. They are sensitive to different types of errors. The influence of main experimental errors: phase-step miscalibration, spatial carrier miscalibration, average intensity changes and intensity noise in both the presented techniques on the fringe function determination (|J 0| or J 0 2 in case of sinusoidal vibrations), is discussed. The techniques are compared to find the most appropriate one. The time-average technique with heterodyning for small vibration–amplitude measurements is also discussed. The application of the SCPS method to this technique is shown for the first time. [Copyright &y& Elsevier] |
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| Database: |
Engineering Source |
