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Silicon microelement vibration testing using conventional and heterodyned time-average interferometry with automated temporal and spatial phase stepping

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Title: Silicon microelement vibration testing using conventional and heterodyned time-average interferometry with automated temporal and spatial phase stepping
Authors: Styk, Adam1, Patorski, Krzysztof k.patorski@mchtr.pw.edu.pl
Source: Optics & Lasers in Engineering. Mar2009, Vol. 47 Issue 3/4, p504-511. 8p.
Subjects: Vibration measurements, Interferometry, Diffraction patterns, Mathematical formulas
Abstract: Abstract: This paper focuses on the applicability of the temporal (TPS) and spatial carrier (SCPS) phase-shifting techniques to the time-average interferogram intensity modulation distribution determination. Both techniques use the same mathematical formulae, but in different domains: temporal and spatial ones. They are sensitive to different types of errors. The influence of main experimental errors: phase-step miscalibration, spatial carrier miscalibration, average intensity changes and intensity noise in both the presented techniques on the fringe function determination (|J 0| or J 0 2 in case of sinusoidal vibrations), is discussed. The techniques are compared to find the most appropriate one. The time-average technique with heterodyning for small vibration–amplitude measurements is also discussed. The application of the SCPS method to this technique is shown for the first time. [Copyright &y& Elsevier]
Copyright of Optics & Lasers in Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 36477861
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Silicon microelement vibration testing using conventional and heterodyned time-average interferometry with automated temporal and spatial phase stepping
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  Data: <searchLink fieldCode="AR" term="%22Styk%2C+Adam%22">Styk, Adam</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Patorski%2C+Krzysztof%22">Patorski, Krzysztof</searchLink><i> k.patorski@mchtr.pw.edu.pl</i>
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  Data: <searchLink fieldCode="JN" term="%22Optics+%26+Lasers+in+Engineering%22">Optics & Lasers in Engineering</searchLink>. Mar2009, Vol. 47 Issue 3/4, p504-511. 8p.
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  Data: <searchLink fieldCode="DE" term="%22Vibration+measurements%22">Vibration measurements</searchLink><br /><searchLink fieldCode="DE" term="%22Interferometry%22">Interferometry</searchLink><br /><searchLink fieldCode="DE" term="%22Diffraction+patterns%22">Diffraction patterns</searchLink><br /><searchLink fieldCode="DE" term="%22Mathematical+formulas%22">Mathematical formulas</searchLink>
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  Label: Abstract
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  Data: Abstract: This paper focuses on the applicability of the temporal (TPS) and spatial carrier (SCPS) phase-shifting techniques to the time-average interferogram intensity modulation distribution determination. Both techniques use the same mathematical formulae, but in different domains: temporal and spatial ones. They are sensitive to different types of errors. The influence of main experimental errors: phase-step miscalibration, spatial carrier miscalibration, average intensity changes and intensity noise in both the presented techniques on the fringe function determination (|J 0| or J 0 2 in case of sinusoidal vibrations), is discussed. The techniques are compared to find the most appropriate one. The time-average technique with heterodyning for small vibration–amplitude measurements is also discussed. The application of the SCPS method to this technique is shown for the first time. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Optics & Lasers in Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.optlaseng.2008.03.004
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      – Code: eng
        Text: English
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        PageCount: 8
        StartPage: 504
    Subjects:
      – SubjectFull: Vibration measurements
        Type: general
      – SubjectFull: Interferometry
        Type: general
      – SubjectFull: Diffraction patterns
        Type: general
      – SubjectFull: Mathematical formulas
        Type: general
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      – TitleFull: Silicon microelement vibration testing using conventional and heterodyned time-average interferometry with automated temporal and spatial phase stepping
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              Text: Mar2009
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            – TitleFull: Optics & Lasers in Engineering
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