TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector

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Bibliographic Details
Title: TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector
Authors: Bilevych, Y.1, Carballo, V.M. Blanco2, Chefdeville, M.1, Fransen, M.1, van der Graaf, H.1, Salm, C.2 C.Salm@utwente.nl, Schmitz, J.2, Timmermans, J.1
Source: Nuclear Instruments & Methods in Physics Research Section A. Nov2009, Vol. 610 Issue 3, p644-648. 5p.
Subjects: Semiconductor wafers, Gas detectors, Integrated circuits, Cosmic rays, Radioisotope decay, Complementary metal oxide semiconductors, Image converters
Abstract: Abstract: This paper presents a new multistage Micro Patterned Gaseous Detector (MPGD) made by wafer post-processing. The device consists of a double metal grid supported by SU-8 structures on top of a Timepix chip. The detector has been operated with He/iC4H10 and Ar/iC4H10 gas mixtures. Cosmic rays as well as 55Fe decay events have been recorded using the Timepix chip in 2D and 3D readout modes. The detector can be operated like a Micromegas (high field close to the chip) or like a GEM (amplification stage followed by a low extraction field). This approach for manufacturing GEM-like radiation imaging detectors allows for precise dimensional control and considerable geometrical design freedom. [Copyright &y& Elsevier]
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Database: Engineering Source
Description
Abstract:Abstract: This paper presents a new multistage Micro Patterned Gaseous Detector (MPGD) made by wafer post-processing. The device consists of a double metal grid supported by SU-8 structures on top of a Timepix chip. The detector has been operated with He/iC4H10 and Ar/iC4H10 gas mixtures. Cosmic rays as well as 55Fe decay events have been recorded using the Timepix chip in 2D and 3D readout modes. The detector can be operated like a Micromegas (high field close to the chip) or like a GEM (amplification stage followed by a low extraction field). This approach for manufacturing GEM-like radiation imaging detectors allows for precise dimensional control and considerable geometrical design freedom. [Copyright &y& Elsevier]
ISSN:01689002
DOI:10.1016/j.nima.2009.09.054