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TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector

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Title: TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector
Authors: Bilevych, Y.1, Carballo, V.M. Blanco2, Chefdeville, M.1, Fransen, M.1, van der Graaf, H.1, Salm, C.2 C.Salm@utwente.nl, Schmitz, J.2, Timmermans, J.1
Source: Nuclear Instruments & Methods in Physics Research Section A. Nov2009, Vol. 610 Issue 3, p644-648. 5p.
Subjects: Semiconductor wafers, Gas detectors, Integrated circuits, Cosmic rays, Radioisotope decay, Complementary metal oxide semiconductors, Image converters
Abstract: Abstract: This paper presents a new multistage Micro Patterned Gaseous Detector (MPGD) made by wafer post-processing. The device consists of a double metal grid supported by SU-8 structures on top of a Timepix chip. The detector has been operated with He/iC4H10 and Ar/iC4H10 gas mixtures. Cosmic rays as well as 55Fe decay events have been recorded using the Timepix chip in 2D and 3D readout modes. The detector can be operated like a Micromegas (high field close to the chip) or like a GEM (amplification stage followed by a low extraction field). This approach for manufacturing GEM-like radiation imaging detectors allows for precise dimensional control and considerable geometrical design freedom. [Copyright &y& Elsevier]
Copyright of Nuclear Instruments & Methods in Physics Research Section A is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 45067173
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector
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  Data: <searchLink fieldCode="AR" term="%22Bilevych%2C+Y%2E%22">Bilevych, Y.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Carballo%2C+V%2EM%2E+Blanco%22">Carballo, V.M. Blanco</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Chefdeville%2C+M%2E%22">Chefdeville, M.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Fransen%2C+M%2E%22">Fransen, M.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22van+der+Graaf%2C+H%2E%22">van der Graaf, H.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Salm%2C+C%2E%22">Salm, C.</searchLink><relatesTo>2</relatesTo><i> C.Salm@utwente.nl</i><br /><searchLink fieldCode="AR" term="%22Schmitz%2C+J%2E%22">Schmitz, J.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Timmermans%2C+J%2E%22">Timmermans, J.</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Nuclear+Instruments+%26+Methods+in+Physics+Research+Section+A%22">Nuclear Instruments & Methods in Physics Research Section A</searchLink>. Nov2009, Vol. 610 Issue 3, p644-648. 5p.
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  Data: <searchLink fieldCode="DE" term="%22Semiconductor+wafers%22">Semiconductor wafers</searchLink><br /><searchLink fieldCode="DE" term="%22Gas+detectors%22">Gas detectors</searchLink><br /><searchLink fieldCode="DE" term="%22Integrated+circuits%22">Integrated circuits</searchLink><br /><searchLink fieldCode="DE" term="%22Cosmic+rays%22">Cosmic rays</searchLink><br /><searchLink fieldCode="DE" term="%22Radioisotope+decay%22">Radioisotope decay</searchLink><br /><searchLink fieldCode="DE" term="%22Complementary+metal+oxide+semiconductors%22">Complementary metal oxide semiconductors</searchLink><br /><searchLink fieldCode="DE" term="%22Image+converters%22">Image converters</searchLink>
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  Data: Abstract: This paper presents a new multistage Micro Patterned Gaseous Detector (MPGD) made by wafer post-processing. The device consists of a double metal grid supported by SU-8 structures on top of a Timepix chip. The detector has been operated with He/iC4H10 and Ar/iC4H10 gas mixtures. Cosmic rays as well as 55Fe decay events have been recorded using the Timepix chip in 2D and 3D readout modes. The detector can be operated like a Micromegas (high field close to the chip) or like a GEM (amplification stage followed by a low extraction field). This approach for manufacturing GEM-like radiation imaging detectors allows for precise dimensional control and considerable geometrical design freedom. [Copyright &y& Elsevier]
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  Data: <i>Copyright of Nuclear Instruments & Methods in Physics Research Section A is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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        Value: 10.1016/j.nima.2009.09.054
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      – Code: eng
        Text: English
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    Subjects:
      – SubjectFull: Semiconductor wafers
        Type: general
      – SubjectFull: Gas detectors
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      – SubjectFull: Integrated circuits
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      – SubjectFull: Cosmic rays
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      – SubjectFull: Radioisotope decay
        Type: general
      – SubjectFull: Complementary metal oxide semiconductors
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      – SubjectFull: Image converters
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      – TitleFull: TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector
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              Text: Nov2009
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