Microstructure of sputter-deposited strontium titanate films.
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| Title: | Microstructure of sputter-deposited strontium titanate films. |
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| Authors: | Nakahara, Shohei1,2, Kim, Deok-Yang3, Jin Kim, Jae4, Hwang, James C. M.2 |
| Source: | Journal of Electron Microscopy. Apr2011, Vol. 60 Issue 2, p133-142. 10p. |
| Subjects: | Microstructure, Transmission electron microscopy, Materials texture, Titanates, Thin films, Dielectrics, Simulation methods & models, Electron diffraction, Polycrystals |
| Abstract: | The origin of a marked difference in a dielectric constant, κ, observed between two types of strontium titanium oxide (STO) films sputter-deposited on platinum layers was investigated using a transmission electron microscopy method. The first type of STO films having a low κ value initially grew as an amorphous phase, followed by the formation of a randomly oriented polycrystalline phase. The second type with a high κ, on the other hand, not only grew as a crystalline phase throughout the entire film thickness, but also exhibited a strong [111] fiber texture. The observed difference in κ between these two types of STO films can thus be explained in terms of the degree of film crystallinity and texture. [ABSTRACT FROM AUTHOR] |
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| Database: | Engineering Source |
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