Fabrication and characterization of planar millimetre-wave Schottky diodes exploiting an epitaxial aluminium on GaAs structure.

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Bibliographic Details
Title: Fabrication and characterization of planar millimetre-wave Schottky diodes exploiting an epitaxial aluminium on GaAs structure.
Authors: Taskin, T., McKell, H., Mak, L., Missous, M.
Source: International Journal of Electronics. Apr95, Vol. 78 Issue 4, p607. 11p.
Subjects: Diodes, Epitaxy
Abstract: Reports on the fabrication and characterization of planar, millimeter-wave diodes with in situ deposited epitaxial aluminum (Al) Schottky contacts. Self-aligned technique developed to connect the in situ grown epitaxial Al Schottky contacts to the ex situ deposited bonding pads.
Database: Engineering Source
Description
Abstract:Reports on the fabrication and characterization of planar, millimeter-wave diodes with in situ deposited epitaxial aluminum (Al) Schottky contacts. Self-aligned technique developed to connect the in situ grown epitaxial Al Schottky contacts to the ex situ deposited bonding pads.
ISSN:00207217
DOI:10.1080/00207219508926194