Absolute total and partial electron ionization cross sections of C2F6
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| Title: | Absolute total and partial electron ionization cross sections of C |
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| Authors: | Basner, R.1, Schmidt, M.1, Denisov, E.1, Lopata, P.2, Becker, K.2, Deutsch, H.3 |
| Source: | International Journal of Mass Spectrometry. Mar2002, Vol. 214 Issue 3, p365. 10p. |
| Subjects: | Ionization (Atomic physics), Nuclear cross sections, Plasma etching |
| Abstract: | We measured absolute partial and total cross sections for the electron ionization of hexafluoroethane (C2F6) from threshold to 900 eV using a time-of-flight mass spectrometer (TOF-MS), which can be operated in a linear and in a reflection mode. Measurements were also made for tetrafluoromethane (CF4), which is perhaps the most thoroughly investigated complex polyatomic molecule in terms of ionization cross sections, in an effort to demonstrate the reliable performance of our apparatus. Our measurements for both CF4 and C2F6 are compared with other available experimental data and with calculated cross sections. [Copyright &y& Elsevier] |
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| Database: | Engineering Source |
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