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Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces

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Title: Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces
Authors: Hruby, Vojtech, Hrach, Rudolf rudolf.hrach@mff.cuni.cz
Source: Vacuum. Apr2013, Vol. 90, p109-113. 5p.
Subjects: Computer simulation, Substrates (Materials science), Metal ions, Plasma gases, Simulation methods & models, Poisson's equation
Abstract: Abstract: The influence of the unevenness of substrates immersed into plasma on plasma–surface interactions was studied by the combination of multidimensional fluid modelling and particle simulation connected together in iterative hybrid code. The fluid part of our model consisted of continuity equations for all charged species and Poisson''s equation. The non self-consistent particle simulation technique was used both for the calculation of local electron energy distribution function and for the derivation of quantities characterising plasma–surface interaction. This approach enabled us to study in detail the structure of the plasma near metal substrates with complex geometries, i.e. planar substrates covered by a variety of hemispherical protrusions. The main attention was devoted to the influence of substrate unevenness in both macroscopic and microscopic spatial scales on both metal ions and ions of background gas propagation to the substrate. [Copyright &y& Elsevier]
Copyright of Vacuum is the property of Pergamon Press - An Imprint of Elsevier Science and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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Header DbId: egs
DbLabel: Engineering Source
An: 84190849
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces
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  Data: <searchLink fieldCode="AR" term="%22Hruby%2C+Vojtech%22">Hruby, Vojtech</searchLink><br /><searchLink fieldCode="AR" term="%22Hrach%2C+Rudolf%22">Hrach, Rudolf</searchLink><i> rudolf.hrach@mff.cuni.cz</i>
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  Data: <searchLink fieldCode="JN" term="%22Vacuum%22">Vacuum</searchLink>. Apr2013, Vol. 90, p109-113. 5p.
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  Data: <searchLink fieldCode="DE" term="%22Computer+simulation%22">Computer simulation</searchLink><br /><searchLink fieldCode="DE" term="%22Substrates+%28Materials+science%29%22">Substrates (Materials science)</searchLink><br /><searchLink fieldCode="DE" term="%22Metal+ions%22">Metal ions</searchLink><br /><searchLink fieldCode="DE" term="%22Plasma+gases%22">Plasma gases</searchLink><br /><searchLink fieldCode="DE" term="%22Simulation+methods+%26+models%22">Simulation methods & models</searchLink><br /><searchLink fieldCode="DE" term="%22Poisson's+equation%22">Poisson's equation</searchLink>
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  Label: Abstract
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  Data: Abstract: The influence of the unevenness of substrates immersed into plasma on plasma–surface interactions was studied by the combination of multidimensional fluid modelling and particle simulation connected together in iterative hybrid code. The fluid part of our model consisted of continuity equations for all charged species and Poisson''s equation. The non self-consistent particle simulation technique was used both for the calculation of local electron energy distribution function and for the derivation of quantities characterising plasma–surface interaction. This approach enabled us to study in detail the structure of the plasma near metal substrates with complex geometries, i.e. planar substrates covered by a variety of hemispherical protrusions. The main attention was devoted to the influence of substrate unevenness in both macroscopic and microscopic spatial scales on both metal ions and ions of background gas propagation to the substrate. [Copyright &y& Elsevier]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Vacuum is the property of Pergamon Press - An Imprint of Elsevier Science and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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        Value: 10.1016/j.vacuum.2012.09.005
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      – Code: eng
        Text: English
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        PageCount: 5
        StartPage: 109
    Subjects:
      – SubjectFull: Computer simulation
        Type: general
      – SubjectFull: Substrates (Materials science)
        Type: general
      – SubjectFull: Metal ions
        Type: general
      – SubjectFull: Plasma gases
        Type: general
      – SubjectFull: Simulation methods & models
        Type: general
      – SubjectFull: Poisson's equation
        Type: general
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      – TitleFull: Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces
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              Text: Apr2013
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              Y: 2013
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