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Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process.

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Title: Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process.
Authors: Wu Yu-Lin1, Deng Hui1, Yu Hai-Feng1, Xue Guang-Ming1, Tian Ye1, Li Jie1, Chen Ying-Fei1, Zhao Shi-Ping1, Zheng Dong-Ning1 dzheng@aphy.iphy.ac.cn
Source: Chinese Physics B. 2013, Vol. 22 Issue 6, p1-5. 5p.
Subjects: Josephson junctions, Quantum computing, Oxidation, Quantum mechanics, Electron beam lithography
Abstract: Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks: Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (jc) and wide range of junction sizes from 0.01 µm² up to 1 µm². We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for super-conducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks: Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (jc) and wide range of junction sizes from 0.01 µm² up to 1 µm². We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for super-conducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits. [ABSTRACT FROM AUTHOR]
ISSN:16741056
DOI:10.1088/1674-1056/22/6/060309