Bibliographic Details
| Title: |
UV-induced modification of fluorocarbon for improvement of subsequent wet removal. |
| Authors: |
Le, Q.T.1 QuocToan.Le@imec.be, Simms, I.2, Yue, H.2, Brown, I.2, Kesters, E.1, Vereecke, G.1, Struyf, H.1, De Gendt, S.1,3 |
| Source: |
Microelectronic Engineering. Feb2014, Vol. 114, p136-140. 5p. |
| Subjects: |
Ultraviolet radiation, Fluorocarbons, Atmospheric research, Radiation exposure, Carbon compounds, Chemical processes |
| Abstract: |
Highlights: [•] We studied the effect of UV exposure parameters on a model CFx polymer. [•] A partial removal of CFx (x =1–3) and CF CF2 groups occurred during the UV irradiation in oxygen. [•] The extent of the polymer modification during UV exposure determined the removal efficiency in the subsequent wet clean. [•] The UV dose and the atmosphere in which the UV pre-treatment is carried out represent the most critical parameters. [•] Good compatibility of the UV process with a 2.0 low-k material (Δk ⩽0.1), except for PO2 >100Torr at high dose. [Copyright &y& Elsevier] |
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| Database: |
Engineering Source |
