Le, Q., Simms, I., Yue, H., Brown, I., Kesters, E., Vereecke, G., . . . De Gendt, S. (2014). UV-induced modification of fluorocarbon for improvement of subsequent wet removal. Microelectronic Engineering, 114, 136. https://doi.org/10.1016/j.mee.2013.03.112
Chicago Style (17th ed.) CitationLe, Q.T, I. Simms, H. Yue, I. Brown, E. Kesters, G. Vereecke, H. Struyf, and S. De Gendt. "UV-induced Modification of Fluorocarbon for Improvement of Subsequent Wet Removal." Microelectronic Engineering 114 (2014): 136. https://doi.org/10.1016/j.mee.2013.03.112.
MLA (9th ed.) CitationLe, Q.T, et al. "UV-induced Modification of Fluorocarbon for Improvement of Subsequent Wet Removal." Microelectronic Engineering, vol. 114, 2014, p. 136, https://doi.org/10.1016/j.mee.2013.03.112.
Warning: These citations may not always be 100% accurate.
