APA (7th ed.) Citation

Haque, R. M., & Wise, K. D. (2013). A Glass-in-Silicon Reflow Process for Three-Dimensional Microsystems. Journal of Microelectromechanical Systems, 22(6), 1470. https://doi.org/10.1109/JMEMS.2013.2265851

Chicago Style (17th ed.) Citation

Haque, Razi-ul M., and Kensall D. Wise. "A Glass-in-Silicon Reflow Process for Three-Dimensional Microsystems." Journal of Microelectromechanical Systems 22, no. 6 (2013): 1470. https://doi.org/10.1109/JMEMS.2013.2265851.

MLA (9th ed.) Citation

Haque, Razi-ul M., and Kensall D. Wise. "A Glass-in-Silicon Reflow Process for Three-Dimensional Microsystems." Journal of Microelectromechanical Systems, vol. 22, no. 6, 2013, p. 1470, https://doi.org/10.1109/JMEMS.2013.2265851.