Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach.
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| Title: | Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach. |
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| Authors: | Skvortsov, I. V.1 (AUTHOR) skvorcov_ilya@mail.ru, Shemakhin, A. Y.1 (AUTHOR), Danilov, I. Y.1 (AUTHOR), Gaskova, D. A.1,2 (AUTHOR) |
| Source: | High Energy Chemistry. 2024 Suppl 3, Vol. 58, pS421-S424. 4p. |
| Database: | Environment Complete |
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| ISSN: | 00181439 |
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| DOI: | 10.1134/S0018143924701273 |
