Fluorine in silicon: diffusion, trapping, and precipitation.

Saved in:
Bibliographic Details
Title: Fluorine in silicon: diffusion, trapping, and precipitation.
Authors: Pi XD; Department of Physics, University of Bath, Bath BA2 7AY, United Kingdom., Burrows CP, Coleman PG
Source: Physical review letters [Phys Rev Lett] 2003 Apr 18; Vol. 90 (15), pp. 155901. Date of Electronic Publication: 2003 Apr 17.
Publication Type: Journal Article
Journal Info: Publisher: American Physical Society Country of Publication: United States NLM ID: 0401141 Publication Model: Print-Electronic Cited Medium: Print ISSN: 0031-9007 (Print) Linking ISSN: 00319007 NLM ISO Abbreviation: Phys Rev Lett Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:0031-9007
DOI:10.1103/PhysRevLett.90.155901