High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.

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Title: High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.
Authors: Wu W; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. wjwu@hust.edu.cn., Zheng P; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. D201177044@hust.edu.cn., Liu J; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. jinquanliu@hust.edu.cn., Li Z; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. lizhu@hust.edu.cn., Fan J; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. fanji@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. fanji@hust.edu.cn., Liu H; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. huafengliu@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. huafengliu@hust.edu.cn., Tu L; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. tlc@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. tlc@hust.edu.cn.
Source: Sensors (Basel, Switzerland) [Sensors (Basel)] 2017 Sep 20; Vol. 17 (9). Date of Electronic Publication: 2017 Sep 20.
Publication Type: Journal Article
Journal Info: Publisher: MDPI Country of Publication: Switzerland NLM ID: 101204366 Publication Model: Electronic Cited Medium: Internet ISSN: 1424-8220 (Electronic) Linking ISSN: 14248220 NLM ISO Abbreviation: Sensors (Basel) Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:1424-8220
DOI:10.3390/s17092158