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High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.

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Title: High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.
Authors: Wu W; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. wjwu@hust.edu.cn., Zheng P; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. D201177044@hust.edu.cn., Liu J; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. jinquanliu@hust.edu.cn., Li Z; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. lizhu@hust.edu.cn., Fan J; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. fanji@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. fanji@hust.edu.cn., Liu H; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. huafengliu@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. huafengliu@hust.edu.cn., Tu L; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. tlc@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. tlc@hust.edu.cn.
Source: Sensors (Basel, Switzerland) [Sensors (Basel)] 2017 Sep 20; Vol. 17 (9). Date of Electronic Publication: 2017 Sep 20.
Publication Type: Journal Article
Journal Info: Publisher: MDPI Country of Publication: Switzerland NLM ID: 101204366 Publication Model: Electronic Cited Medium: Internet ISSN: 1424-8220 (Electronic) Linking ISSN: 14248220 NLM ISO Abbreviation: Sensors (Basel) Subsets: PubMed not MEDLINE
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  Data: High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.
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  Data: <searchLink fieldCode="AU" term="%22Wu+W%22">Wu W</searchLink>; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. wjwu@hust.edu.cn.<br /><searchLink fieldCode="AU" term="%22Zheng+P%22">Zheng P</searchLink>; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. D201177044@hust.edu.cn.<br /><searchLink fieldCode="AU" term="%22Liu+J%22">Liu J</searchLink>; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. jinquanliu@hust.edu.cn.<br /><searchLink fieldCode="AU" term="%22Li+Z%22">Li Z</searchLink>; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. lizhu@hust.edu.cn.<br /><searchLink fieldCode="AU" term="%22Fan+J%22">Fan J</searchLink>; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. fanji@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. fanji@hust.edu.cn.<br /><searchLink fieldCode="AU" term="%22Liu+H%22">Liu H</searchLink>; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. huafengliu@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. huafengliu@hust.edu.cn.<br /><searchLink fieldCode="AU" term="%22Tu+L%22">Tu L</searchLink>; MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China. tlc@hust.edu.cn.; Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China. tlc@hust.edu.cn.
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  Data: <searchLink fieldCode="JN" term="%22101204366%22">Sensors (Basel, Switzerland)</searchLink> [Sensors (Basel)] 2017 Sep 20; Vol. 17 (9). <i>Date of Electronic Publication: </i>2017 Sep 20.
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              Text: 2017 Sep 20
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