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Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures.

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Title: Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures.
Authors: Wenisch R; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Lungwitz F; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Hanf D; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Heller R; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Zscharschuch J; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Hübner R; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., von Borany J; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Abrasonis G; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Gemming S; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.; Technische Universität Chemnitz , Reichenhainer Straße 70 , 09126 Chemnitz , Germany., Escobar-Galindo R; Departamento de Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica, IMEYMAT , Universidad de Cádiz , 11510 Puerto Real , Spain., Krause M; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.
Source: Analytical chemistry [Anal Chem] 2018 Jul 03; Vol. 90 (13), pp. 7837-7842. Date of Electronic Publication: 2018 Jun 13.
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 0370536 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1520-6882 (Electronic) Linking ISSN: 00032700 NLM ISO Abbreviation: Anal Chem Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:1520-6882
DOI:10.1021/acs.analchem.8b00923