APA (7th ed.) Citation

R, W., F, L., D, H., R, H., J, Z., R, H., . . . M, K. (2018). Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures. Analytical chemistry, 90(13), 7837. https://doi.org/10.1021/acs.analchem.8b00923

Chicago Style (17th ed.) Citation

R, Wenisch, et al. "Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures." Analytical Chemistry 90, no. 13 (2018): 7837. https://doi.org/10.1021/acs.analchem.8b00923.

MLA (9th ed.) Citation

R, Wenisch, et al. "Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures." Analytical Chemistry, vol. 90, no. 13, 2018, p. 7837, https://doi.org/10.1021/acs.analchem.8b00923.