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Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures.

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Title: Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures.
Authors: Wenisch R; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Lungwitz F; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Hanf D; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Heller R; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Zscharschuch J; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Hübner R; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., von Borany J; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Abrasonis G; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany., Gemming S; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.; Technische Universität Chemnitz , Reichenhainer Straße 70 , 09126 Chemnitz , Germany., Escobar-Galindo R; Departamento de Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica, IMEYMAT , Universidad de Cádiz , 11510 Puerto Real , Spain., Krause M; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.
Source: Analytical chemistry [Anal Chem] 2018 Jul 03; Vol. 90 (13), pp. 7837-7842. Date of Electronic Publication: 2018 Jun 13.
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 0370536 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1520-6882 (Electronic) Linking ISSN: 00032700 NLM ISO Abbreviation: Anal Chem Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures.
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  Data: <searchLink fieldCode="AU" term="%22Wenisch+R%22">Wenisch R</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.<br /><searchLink fieldCode="AU" term="%22Lungwitz+F%22">Lungwitz F</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.<br /><searchLink fieldCode="AU" term="%22Hanf+D%22">Hanf D</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.<br /><searchLink fieldCode="AU" term="%22Heller+R%22">Heller R</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.<br /><searchLink fieldCode="AU" term="%22Zscharschuch+J%22">Zscharschuch J</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.<br /><searchLink fieldCode="AU" term="%22Hübner+R%22">Hübner R</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.<br /><searchLink fieldCode="AU" term="%22von+Borany+J%22">von Borany J</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.<br /><searchLink fieldCode="AU" term="%22Abrasonis+G%22">Abrasonis G</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.<br /><searchLink fieldCode="AU" term="%22Gemming+S%22">Gemming S</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.; Technische Universität Chemnitz , Reichenhainer Straße 70 , 09126 Chemnitz , Germany.<br /><searchLink fieldCode="AU" term="%22Escobar-Galindo+R%22">Escobar-Galindo R</searchLink>; Departamento de Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica, IMEYMAT , Universidad de Cádiz , 11510 Puerto Real , Spain.<br /><searchLink fieldCode="AU" term="%22Krause+M%22">Krause M</searchLink>; Helmholtz-Zentrum Dresden-Rossendorf , Bautzner Landstr. 400 , 01328 Dresden , Germany.
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  Data: <searchLink fieldCode="JN" term="%220370536%22">Analytical chemistry</searchLink> [Anal Chem] 2018 Jul 03; Vol. 90 (13), pp. 7837-7842. <i>Date of Electronic Publication: </i>2018 Jun 13.
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        Value: 10.1021/acs.analchem.8b00923
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              Text: 2018 Jul 03
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