Bibliographic Details
| Title: |
Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition. |
| Authors: |
Dickey E, Niiranen K, Danforth B, Barrow WA |
| Source: |
Applied optics [Appl Opt] 2020 Feb 10; Vol. 59 (5), pp. A16-A19. |
| Publication Type: |
Journal Article |
| Journal Info: |
Publisher: Optica Publishing Group Country of Publication: United States NLM ID: 0247660 Publication Model: Print Cited Medium: Internet ISSN: 1539-4522 (Electronic) Linking ISSN: 1559128X NLM ISO Abbreviation: Appl Opt Subsets: MEDLINE; PubMed not MEDLINE |
| Database: |
MEDLINE Ultimate |
