APA (7th ed.) Citation

E, D., K, N., B, D., & WA, B. (2020). Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition. Applied optics, 59(5), A16. https://doi.org/10.1364/AO.59.000A16

Chicago Style (17th ed.) Citation

E, Dickey, Niiranen K, Danforth B, and Barrow WA. "Macro-conformality of Coatings Deposited Using High-speed Spatial Plasma-enhanced Atomic Layer Deposition." Applied Optics 59, no. 5 (2020): A16. https://doi.org/10.1364/AO.59.000A16.

MLA (9th ed.) Citation

E, Dickey, et al. "Macro-conformality of Coatings Deposited Using High-speed Spatial Plasma-enhanced Atomic Layer Deposition." Applied Optics, vol. 59, no. 5, 2020, p. A16, https://doi.org/10.1364/AO.59.000A16.