Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition.
Saved in:
| Title: | Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition. |
|---|---|
| Authors: | Dickey E, Niiranen K, Danforth B, Barrow WA |
| Source: | Applied optics [Appl Opt] 2020 Feb 10; Vol. 59 (5), pp. A16-A19. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: Optica Publishing Group Country of Publication: United States NLM ID: 0247660 Publication Model: Print Cited Medium: Internet ISSN: 1539-4522 (Electronic) Linking ISSN: 1559128X NLM ISO Abbreviation: Appl Opt Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
Be the first to leave a comment!
