Study of the Absorption of Electromagnetic Radiation by 3D, Vacuum-Packaged, Nano-Machined CMOS Transistors for Uncooled IR Sensing.
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| Title: | Study of the Absorption of Electromagnetic Radiation by 3D, Vacuum-Packaged, Nano-Machined CMOS Transistors for Uncooled IR Sensing. |
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| Authors: | Cherniak G; Electrical Engineering Department, Technion-Israel Institute of Technology, Haifa 32000, Israel., Avraham M; Electrical Engineering Department, Technion-Israel Institute of Technology, Haifa 32000, Israel.; Department of Electrical Engineering and Electronics, Ariel University, Ariel 40700, Israel., Bar-Lev S; Electrical Engineering Department, Technion-Israel Institute of Technology, Haifa 32000, Israel., Golan G; Department of Electrical Engineering and Electronics, Ariel University, Ariel 40700, Israel., Nemirovsky Y; Electrical Engineering Department, Technion-Israel Institute of Technology, Haifa 32000, Israel. |
| Source: | Micromachines [Micromachines (Basel)] 2021 May 16; Vol. 12 (5). Date of Electronic Publication: 2021 May 16. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101640903 Publication Model: Electronic Cited Medium: Print ISSN: 2072-666X (Print) Linking ISSN: 2072666X NLM ISO Abbreviation: Micromachines (Basel) Subsets: PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| ISSN: | 2072-666X |
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| DOI: | 10.3390/mi12050563 |
