| Authors: |
Chang SJ; International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Teng CY; Department of Materials Science & Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Lin YJ; Department of Materials Science & Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Wu TM; Department of Electro-physics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan., Lee MH; Institute of Electro-Optical Science and Technology, National Taiwan Normal University, Taipei 10610, Taiwan., Lin BH; National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan., Tang MT; National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan., Wu TS; National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan., Hu C; International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.; Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, United States., Tang EY; Taiwan Semiconductor Research Institute, Hsinchu 30010, Taiwan., Tseng YC; Department of Materials Science & Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan. |
